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Institute of Physics & Technology

Institute of Physics & Technology. Russian Academy of Sciences Director academicion Kamil Valiev. IPT RAS. Lab of Microstructuring & Submicron Devices Lab of MEMS Lab of Micro- and Nanostructures Characterization Lab of Technological Processes Simulation

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Institute of Physics & Technology

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  1. Institute of Physics & Technology Russian Academy of Sciences Director academicion Kamil Valiev

  2. IPT RAS • Lab of Microstructuring & Submicron Devices • Lab of MEMS • Lab of Micro- and Nanostructures Characterization • Lab of Technological Processes Simulation • Lab of Quantum Computers Physics

  3. Fundamental Quantum computers physics Low temperature plasma physics Semiconductors devices physics Nanomagnetics physics X-ray diffraction theory Applied HDP based processing HDP and ion sources Equipments for deposition, etching, and ion implantation Plasma diagnostics and end-point detection Metals and silicides Modelling of technological processes and devices IPT RAS: Main fields of Activities

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