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ACADZ inc.

ACADZ inc. C. A. D. TM. a. z. www.acadzinc.com. ISSM 2003 Simulation Model Analysis of AMHS w/Area Elevators for an 8 inch Wafer FAB. ISSM 2003. Presentation September 29, 2003 by ACADZ inc. Luc D’Arcy Collins, President, ACADZ Donald W. Collins, Director of R & D, ACADZ.

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ACADZ inc.

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  1. ACADZ inc. C A D TM a z www.acadzinc.com ISSM 2003 Simulation Model Analysis of AMHS w/Area Elevators for an 8 inch Wafer FAB

  2. ISSM 2003 • Presentation • September 29, 2003 • by • ACADZ inc. • Luc D’Arcy Collins, President, ACADZ • Donald W. Collins, Director of R & D, ACADZ

  3. Presentation Overview • A. AMHS Simulation Model • B. Model Logic • C. Model Example • D. Model Assumptions • E. From-To-Table • F.Statistical Analysis • G. Conclusions

  4. AMHS Simulation Model • Automated Material Handling System (AMHS) for an eight inch Wafer FAB. • The model includes the ability to make changes • to the area stocker layout • number of area stockers • number of loops • number of cars and • number of Lot moves.

  5. Fab Layout Diagram

  6. Model Logic • The “Lot” or “Cassette” arrival rate and departure rate from a machine to another machine is collected and placed on a large detailed From-To Table listing all moves. • This From-To Table listing all moves was used to calculate stocker and loop usage requirements for the FAB area.

  7. Model Assumptions • number of stockers and their placement • number of loops and there placement • number of trains (and cars per train) for each loop • number of elevators if applicable • number of turntables • other if applicable

  8. From-To-Table Travel Distance in Feet

  9. From-To-Table Travel Time in Minutes

  10. Model Example • Show Extend Model Here

  11. Statistical Analysis • Number of trains required by the 6 Area Stockers based on the total lot moves per Hour, assuming 1, 2 and 3 lots on average per train. • Run the simulation with a maximum of 50 trains to determine the utilization of each of the trains.

  12. Number of Trains Required1 Car per Train

  13. Number of Trains Required 3 Cars per Train

  14. Train Utilizations 3 Cars per Train

  15. Conclusions • The estimated maximum number of trains required to service the 6 Area Stockers and meet the number of lots required by customer. • 20 trains with a maximum number of moves in an hour for all six Area Stockers = 804 moves/hour (assumes an average of 3 lots per train). • Each Train can carry up to 6 lots

  16. Question & Answer Session • Are there any questions? • Thank you! • darcy@acadzinc.com • don@acadzinc.com

  17. END • Thank You

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