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Next Generation Integrated Circuits

Next Generation Integrated Circuits. 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips. Next Generation Integrated Circuits. 300 mm wafers

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Next Generation Integrated Circuits

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  1. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  2. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  3. Copper Metallization – Low-K Dielectric

  4. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  5. High-K Gate Dielectric • Reduced fringing of gate electric field – better switching control, less leakage current • Reduced tunneling leakage current with thin oxides • Si3N4, ZrO2, HfO2

  6. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  7. Silicon-On-Insulator • No p-n junction for electrical isolation • Reduced inter-device coupling • Reduced parasitic capacitance • No deep diffusion required for isolation - less fabrication time,closer device packing

  8. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  9. Strained Silicon • Enhanced carrier mobility – compensates for increased ionized impurity scattering in thin, heavily-doped layers

  10. Next Generation Integrated Circuits • 300 mm wafers • Copper metallization • Low-K dielectric under interconnect lines • High-K dielectric under gate • Silicon-on-insulator (SOI) • Strained silicon • New gate metals • Dual-core CPU chips

  11. New Generation ICs at Intel Main Page http://www.intel.com/technology/silicon/index.htm Reports and Publications http://www.intel.com/technology/silicon/research.htm?iid=tech_sil+rd

  12. New Generation ICs at AMD Processor Cores Roadmap http://www.thinkcp.com/AMD/roadmap.html Main Page http://www.amd.com/us-en/

  13. New Generation ICs at AMD Back to Main

  14. New Generation ICs at IBM Main Page http://www.research.ibm.com/ Nanofabrication http://www.ibm.com/search/?en=utf&v=11&lang=en&cc=&lv=w&q=%2BNanofabrication%20%2Burl.all:research.ibm.com Reports and Publications http://www-916.ibm.com/press/prnews.nsf/jan/0C17FDCBF4B76CE185256C6F0064206D

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