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INTEGRATED CIRCUITS

INTEGRATED CIRCUITS. Dr. Esam Yosry. Lec . #9. NPN Transistor Fabrication. Introduction NPN Fabrication-Simple Flow AMI Bipolar Transistor Process Bipolar Fabrication –Masking Layers Typical Bipolar Resistor Technology. Introduction ( Chip Fabrication Cycle).

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INTEGRATED CIRCUITS

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  1. INTEGRATED CIRCUITS Dr. EsamYosry Lec. #9

  2. NPN Transistor Fabrication • Introduction • NPN Fabrication-Simple Flow • AMI Bipolar Transistor Process • Bipolar Fabrication –Masking Layers • Typical Bipolar Resistor Technology

  3. Introduction(Chip Fabrication Cycle)

  4. NPN Transistor (BJT) Fabrication Example Emitter Base Collector

  5. Bipolar Transistor

  6. Bipolar Transistor Fabrication – Simple

  7. AMI Bipolar Transistor Process The beginning wafer is a P-epitaxial layer On a P+ substrate that is oxidized. Oxide P-Epi Layer P+substrate

  8. AMI Bipolar Transistor Process N-Tub Oxide P-Epi Layer N-Tub Collector Field Oxidation Field Oxide Field Oxide Field Oxide P-Epi Layer N-Tub Collector

  9. AMI Bipolar Transistor Process P-Base Formation P-base Field Oxide Field Oxide P-Epi Layer N-Tub Collector P+ Contact Formation P-base Field Oxide Field Oxide P+ P-Epi Layer N-Tub Collector

  10. AMI Bipolar Transistor Process N+ Emitter and Collector Contact Formation P-base Oxide Field Oxide Field Oxide N+ P+ N+ N+ P-Epi Layer N-Tub Collector Contact Apertures P-base Oxide Field Oxide Field Oxide N+ P+ N+ N+ P-Epi Layer N-Tub Collector

  11. Bipolar Fabrication – Masking Layers

  12. Typical Bipolar Resistor Technology P-Base Resistor Formation Field Oxide Field Oxide P+ P-base P+ N+ P-Epi Layer N-Tub P+ N+ Top view of The resistor

  13. Thanks Many thanks to Prof. Hany Fikry and Prof WaelFikry for their useful materials that help me to prepare this presentation.

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