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2704 Vacuum Block. 1 or 3 input gauges Polyfit linearisation Scientific display in mB,Torr, Pascal Bumpless auto gauge switchover 6 On/Off setpoint outputs High vacuum gauge enable signal Roughing pump timer Leak detection routine Displays Chamber Vacuum + 2nd value with user text.
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1 or 3 input gauges Polyfit linearisation Scientific display in mB,Torr, Pascal Bumpless auto gauge switchover 6 On/Off setpoint outputs High vacuum gauge enable signal Roughing pump timer Leak detection routine Displays Chamber Vacuum + 2nd value with user text Vacuum Feature
Heating Thermocouple C Temperature Control Loop Cooling Run Temp SP Program Events Hold Reset Setpoint Programmer Program Wait Signal Hi Vac Gauge mB SP1 Vacuum Function Block SP2 Vacuum Valves Lo Vac Gauge Backing Gauge mB mB PLC Interlocks SP6 Typical Application
Hi Vac Gauge mB Chamber Vacuum Switch-over block Lo Vac Gauge mB Gauge switch-over
10vdc AIM or Penning measurement range Pirani measurement range 10vdc 2vdc 1.0-E08 1.0-E06 1.0-E04 1.0-E02 1.0+E00 1.0+E03 Increasingvacuum(mB) Gauge Switch-over Switch-over region Chamber Vacuum = 50:50
LEAK DET Communications Leak detect Leak detect Leak detected Start Leak Detect • Leak Detect Time • Target leak Rate Chamber Vacuum Pump off
Pump off Communications Profibus-DP Roughing Pump Time-out PUMP TOUT Roughing Pump Time-out Time-out Start • Time • Target Vacuum Chamber Vacuum
GON Communications Profibus-DP Hi Vac. Gauge Enable Gauge Enable Low Vacuum Gauge On Backing Vacuum • Setpoint
Gauge 1 Status OR Gauge 2 Status ERR Gauge 3 Status Communications Profibus-DP Error Indication