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Review of Ion Beam Sputtering Ramin Lalezai ramin@atfilms , voice: 720-494-4194 x-26

Review of Ion Beam Sputtering Ramin Lalezai ramin@atfilms.com , voice: 720-494-4194 x-26 Advanced Thin Films, 105 S. Sunset St Suite G, Longmont, CO 80501 .History of the Kaufman ion source .Early days of ion beam sputtering .The modern IBS machines .Characteristics of IBS optical coatings

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Review of Ion Beam Sputtering Ramin Lalezai ramin@atfilms , voice: 720-494-4194 x-26

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  1. Review of Ion Beam Sputtering Ramin Lalezai ramin@atfilms.com, voice: 720-494-4194 x-26 Advanced Thin Films, 105 S. Sunset St Suite G, Longmont, CO 80501 .History of the Kaufman ion source .Early days of ion beam sputtering .The modern IBS machines .Characteristics of IBS optical coatings -environmental stability -losses -stress .Materials which can be deposited using IBS .”Intrinsic” contaminants in IBS films

  2. Herman Oberth and the ABMA rocket team (Early 1950s)

  3. Ion beam sputtering of optical coatings was invented by technologists at Litton in the early 1970s.

  4. Technology • Ion Beam Sputtering • Dense films (not porous) • Excellent adhesion • Stable and durable • No spectral shift • Low loss • Easy to clean • Indefinite lifetime

  5. Comparison of E-beam evaporated, IAD, and IBS coatings E-beam: Porous. Columnar structure. High scatter. Poor environmental stability. IAD: Increased density. Reduced porosity. High stress. Improved environmental stability. IBS: Dense films. Minimal structure. Low scatter. No porosity. Excellent environmental stability

  6. Spectral shift due to moisture (%). Stress coefficient of mirror coatings (MPa).

  7. Measured Losses

  8. Intrinsic Contaminants in IBS Films 1- Argon (working gas) 2- Water (typically the last element in the vacuum system)

  9. Materials which can be grown using IBS Most oxides Ta2O5, Nb2O5, V2O5, TiO2, ZrO2, HfO2, Al2O3,Y2O3, SiO2, … Most nitrides Si3N4, AlN, TiN, … Most elements Si, Al, Pt, … IBS is generally not suitable for the deposition of fluorides and zinc compounds.

  10. Intrinsic Contaminants in IBS Films 1- Argon (working gas) 2- Water (typically the last element in the vacuum system)

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