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300mm FOUP Load Port Wafer Handling Robot

Kensington Laboratories, the technology leader in semiconductor wafer handling automation products demonstrates their 300mm wafer handling robot.

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300mm FOUP Load Port Wafer Handling Robot

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  1. 300mm FOUP Load Port Wafer Handling Robot 

  2. About us Kensington Laboratories, the technology leader in semiconductor wafer handling automation products demonstrates their 300mm wafer handling robot. Kensington Laboratories' ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington's global service and support network.

  3. Robot Installation • Automated Teaching • Rapid set-up without Experts • Robot Interchangeability • Production Scalability

  4. Built-In Sensor • Detects and measures wafer • Calculates wafer position • Improves system accuracy

  5. Shaped LED Beam • Integrated end effector sensor • LED for reliability and safety

  6. Mapping • Detects stacked wafer cassette errors • Detects cross slotted wafer cassette errors

  7. Wafer Position • Elevation and edge detection • Shaped beam allows measurements vs. only presence/absence detection • Measures both x and z wafer positions

  8. Actuator Deployment • Controlled force for safely gripping wafers • Failsafe closed loop design grips wafer ever in the event of a power or vacuum loss

  9. True Edge Grip • Minimal contact with wafer edge • Virtually eliminates backside contamination from robot gripper

  10. CONTACT US Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800 Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

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