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High-Precision Motion Control Within Nano-Metric Range

The precision motion control system in wafer handling equipment assures high accuracy with a 1 u2013 5 nanometer resolution along with slow constant motion which is greater than or equal to 50 nm per second. For more information, check out the presentation.

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High-Precision Motion Control Within Nano-Metric Range

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  1. High-Precision Motion Control Within Nano-Metric Range - Ideal For Wafer Handling Systems To design perfect systems for wafer alignment, testing, and positioning in a quality control phase, the wafer stages program is designed ideally with high precision motion control within the nanometer range. The precision motion control system in wafer handling equipment assures high accuracy with a 1 – 5 nanometer resolution along with slow constant motion which is greater than or equal to 50 nm per second. In order to improve the dynamic performance special servo motors and ironless linear and torque motors are used. Highly precise linear conductors reduce juddering. Adding of pneumatic subsystem completes the robotics array. Smoother and even motion sequences are produced with higher-order motion profiles and spline functions. Design Freedom With The Help Of Precision Motion Control: To avail an exceptional design freedom, the precision motion control system is based on the embedded control YM which permits for the same. In this, next-gen hardware is designed to manage and run

  2. complex operations which along with the open software design facilitate the development of custom- made motion solutions. These can be easily incorporated with your automation landscape. The exceptionally condensed flexible multi-axis controller supervises all the control and drive hardware. The sophisticated programming languages of MPC permit the writing of highly advanced motion control code modules and programs. The swift and speedy control loops with nearly 32 kHz bandwidth provide pinpoint accuracy and performance. The motion control system manages up to 120 digital and analogue input/outputs simultaneously in real time. Thus you can execute complex process operations on a consistent hardware. The algorithms pre- defined into the system facilitate Zero-vibration and zero-backlash facilities. It includes an open controller design which permits tailored kinematics. Also, the in-built, dialogue- based user interface streamlines the commissioning and the development process, which in turn decreases time to market. Precision motion control system architecture satisfies the extremely intricate and complex requirements however, it still remains easy to control and operate. The flexible architecture supports fast and error free design. A wide range of engines and encoders are sustained with the help of standard PC and motion control unit.

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