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MultiLink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.
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About Multilink Robotic Multilink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.
Exceptional throughput: Proprietary z axis design enables market leading peak speeds of 55 inches/second and acceleration rates of up to 200 inches/second2. Precision wafer placement: High performance design provides precise motion control and eliminates structural deflection and creep. Fast swap times: Dual arm systems have demonstrated swap times of less than 3 seconds and throughput greater than 360 wphon a 4 port configuration. 300mm installed base: Multilink robots are currently installed at 98% of all 300mm fabs.
Prealigner Central Controller The optional central controller provides a simple single wire host interface, coordinating all EFEM operations. A straightforward, user-friendly command set makes interfacing and controlling the Performix fast and easy. High-speed pre-alignment provides state of the art placement accuracy in both vacuum chuck and edge contact configurations. System Features The Performix system’s unique monocoque frame forms a rigid enclosure that reduces vibration and enhances stability. This design eliminates the need for a traditional skin-on-frame EFEM design. A patented datum plane serves as a reference point to ensure precision alignment of components and eliminate tolerance variability.
Key Patents Latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition. FOUP latchkeys require no vacuum door attachment. Dual end effector, multiple link robot arm system with corner reach-around and extended reach capabilities. High torque, synchronously operating multiple link robot arm mechanism. Continuously rotatable multiple link robot arm mechanism. Robot arm with specimen edge gripping end effector. Robot arm with specimen sensing and edge gripping end effector. Self-teaching robot arm position method. Through-beam wafer mapping.
Ease of Use The Performix advantage resides in its ease of use. The impact is superior system availability. Automated Self Teachis patented software that speeds system start ups in a highly repeatable manner. To utilize Automated Self Teach, an operator simply selects pre-programmed, approximate locations for the load port, prealigner, and process equipment. Kensington Laboratories’ patented, optical through-beam wafer locating system automatically registers these locations and calibrates the robot with high accuracy through a short motion operation. Largest installed base of edge grip end effectors is the result of industry leading, proprietary edge grip wafer handling technology, ensuring low backside wafer particle contamination. Simplified command set from the central controller allows for fast, intuitive customer programming of the Performix EFEM automation. Embedded E-Diagnostics enable remote, high level functional testing of components for fault isolation/detection, and provide software teaching of automated material handling system drop off position.
Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com CONTACT US Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800
