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Precision Motion Control Linear Stages

Kensingtonu2019s precision linear stages position substrates, silicon wafers, and photonic devices, quickly with precision and repeatably.

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Precision Motion Control Linear Stages

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  1. Precision Motion Control Linear Stages www.kensingtonlabs.com

  2. Wafer Linear Stage Kensington precision linear stages have addressed the needs for precision motion control for more than a quarter century. The stages are versatile and used individually, combined in X Y Stage Systems for multiple functions, and integrated to make precision multi-axis X-Y-Z-Θ stages, enabling a wide range of precision motion control applications.

  3. Features • Smooth rapid movement immune to linkage backlash • Hysteresis and wear eliminated by non-contacting read-head design • Real-time force-sensing with programmable soft limits for safe operation • EMO features halts motion immediately • System initialization not required to restart after EMO • Quiet operation without resonances or excessive heat

  4. Features • No PID parameter tuning with high step-and-settle performance via mechanical controls and design Easy to use command structure • Resolution of 100nm, 50nm and 25nm • Bi-directional repeatability of 200nm, 100nm and 50nm • Acceleration: 0.001 to 0.25g • Velocity range: 0.01 µm/s to 100 mm/s, top speed of 200 mm/sec • Precision Linear Stage Travel Distances • Linear– from 1″ (25 mm) to 16″ (400 mm) • Vertical – 1″ (25 mm) Mini-Z

  5. Contact Kensington Today For Technical Details And To Obtain A Quotation For Precision Linear Stages From The Precision Motion Control Product

  6. CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800

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