1 / 19

PEB Plate repeatability

LithoWorks PEB. PEB Plate repeatability. Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis . TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@enter.net August 27,2003. Project Summary. Program : LithoWorks PEB

kesler
Download Presentation

PEB Plate repeatability

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. LithoWorks PEB PEB Plate repeatability Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@enter.net August 27,2003

  2. Project Summary • Program: LithoWorks PEB • Situation: • Three data sets have been presented from PEB Bake 8: • July 16,18 & 21 of 2003 • Objective of this analysis: • Determine PEB stability • Note: Activation temperatures are set at 100 oC LithoWorks PEB

  3. July 16 PEB 8 • Thermal variation from wafer mean vs time LithoWorks PEB

  4. July 16: Total THERMAL Energy Integrated area under the time-temp curve LithoWorks PEB

  5. July 16; Energy Variation Integrated area under the time-temp curve showing temperature delta from wafer average LithoWorks PEB

  6. July 16; Range & rise times Plot of range of temperature about the mean temperature AND mean temperature LithoWorks PEB

  7. July 16: Thermal Maps Temperature before heating (left) and at end of maximum temperature period (right) LithoWorks PEB

  8. July 18; PEB 8 LithoWorks PEB

  9. July 18; Energy Total LithoWorks PEB

  10. July 18; Energy Variation LithoWorks PEB

  11. July 18; Thermal Range LithoWorks PEB

  12. July 18; hi/low steady state LithoWorks PEB

  13. July 21; PEB 8 LithoWorks PEB

  14. July 21; Thermal Energy Total LithoWorks PEB

  15. July 21; Variation in Thermal Energy LithoWorks PEB

  16. July 21; Thermal Range over Time LithoWorks PEB

  17. July 21; Steady state temperature profiles LithoWorks PEB

  18. July 21; Thermal Heating Click on image to play movie of thermal heating. Press esc to exit. LithoWorks PEB

  19. Comparison of Rise/Fall Cycles Recall that the July 16 cycle had a slightly larger range/rise in temperature at 127 seconds. Notice that none of the 3 ranges achieved steady state during at the high temperature cycle. Range across the wafer was still at about 1 oC when cooling started. Start of cooling LithoWorks PEB

More Related