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LithoWorks PEB. PEB Plate repeatability. Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis . TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@enter.net August 27,2003. Project Summary. Program : LithoWorks PEB
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LithoWorks PEB PEB Plate repeatability Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@enter.net August 27,2003
Project Summary • Program: LithoWorks PEB • Situation: • Three data sets have been presented from PEB Bake 8: • July 16,18 & 21 of 2003 • Objective of this analysis: • Determine PEB stability • Note: Activation temperatures are set at 100 oC LithoWorks PEB
July 16 PEB 8 • Thermal variation from wafer mean vs time LithoWorks PEB
July 16: Total THERMAL Energy Integrated area under the time-temp curve LithoWorks PEB
July 16; Energy Variation Integrated area under the time-temp curve showing temperature delta from wafer average LithoWorks PEB
July 16; Range & rise times Plot of range of temperature about the mean temperature AND mean temperature LithoWorks PEB
July 16: Thermal Maps Temperature before heating (left) and at end of maximum temperature period (right) LithoWorks PEB
July 18; PEB 8 LithoWorks PEB
July 18; Energy Total LithoWorks PEB
July 18; Energy Variation LithoWorks PEB
July 18; Thermal Range LithoWorks PEB
July 18; hi/low steady state LithoWorks PEB
July 21; PEB 8 LithoWorks PEB
July 21; Thermal Energy Total LithoWorks PEB
July 21; Variation in Thermal Energy LithoWorks PEB
July 21; Thermal Range over Time LithoWorks PEB
July 21; Steady state temperature profiles LithoWorks PEB
July 21; Thermal Heating Click on image to play movie of thermal heating. Press esc to exit. LithoWorks PEB
Comparison of Rise/Fall Cycles Recall that the July 16 cycle had a slightly larger range/rise in temperature at 127 seconds. Notice that none of the 3 ranges achieved steady state during at the high temperature cycle. Range across the wafer was still at about 1 oC when cooling started. Start of cooling LithoWorks PEB