Image obtained using the 320x256 quantum dot multispectral infrared focal plane array

1. Fabrication of Polarimetric Quantum Dot Infrared Photodetector and Focal Plane ArraySandip Tiwari, Cornell University, ECCS - 0335765 Monolithically integrated nano-wire grid polarizer and quantum dot infrared photodetecor and focal plane array were fabricated using E-beam photolithography (75nm) and reactive ion etching. The process enables a new monolithically integrated multi-spectral polarimetric quantum dot photodetector (QDIP) with on-demand waveband selection and simultaneous polarization sensing capabilities. Advantages of the proposed QDIP design including low dark current and high photodetectivity and voltage tunable multispectral infrared detections were demonstrated with very uniform and reproducible performance. Monolithically integrated polarizer with the multi-spectral QDIP was achieved with >30dB polarization extinction ratio covering a wide-spectrum of 2-14 m. The research is expected to provide an enabling multi-spectral polarization agile FPA technology for numerous IR remote sensing and national defense applications. Al Nano-wire grids Ring electrode on the QDIP Picture of the fabricated nano-wire grid polarizer. X. Lu, U. Massachusetts Lowell Work performed using Harvard CNS facility Image obtained using the 320x256 quantum dot multispectral infrared focal plane array 1