North America Information & Control Technical Committee Chapter

1. North America Information & ControlTechnical Committee Chapter Liaison Report February 2017

2. Outline • Leadership • Organization Chart • Meetings Information • Ballot Results • Upcoming Ballots / Ballots to be Reviewed during N.A. Spring 2017 TC Meeting • SNARF(s) Approved by GCS in between TC Chapter Meetings • Old Business (5 Year Review and 3 Year SNARFs) • TF Reports • Proposed Meeting Schedule

3. Leadership • Committee Co-chairs • Brian Rubow(Cimetrix) • Jack Ghiselli(Ghiselli Consulting) • James Moyne (AMAT/University of Michigan) • Leadership Changes • None

4. N.A. I&Cs TC Updated Organization Chart Legend C Chair/Co-Chair L Task Force Leader TF Task Force • North America • Information & Control • Technical Committee Chapter • C: Brian Rubow (Cimetrix) • C: Jack Ghiselli (Ghiselli Consulting) • C: James Moyne (AMAT/UMICH) Sensor Bus TF L: James Moyne (AMAT/UMICH) Diagnostic Data Acquisition (DDA) TF L: Brian Rubow (Cimetrix) L: TBD Energy Saving Equipment Communication (ESEC) TF L: Mike Czerniak (Edwards) L: Andreas Neuber (AMAT) Process Control Systems (PCS) Architecture TF L: James Moyne (AMAT/UMICH) L: Chris Maloney (Intel) GEM300 TF L: Brian Rubow (Cimetrix) L: TBD Graphical User Interfaces (GUI) TF L: Frank H. Summers (ISGI) NOTE: Italics means group is currently inactive.

5. Meeting Information • Last meeting • November 9, 2016 @ N.A. Standards Fall 2016 Meetings • SEMI Headquarters, California • Next meeting • April 5, 2017 @ N.A. Standards Spring 2017 Meetings • SEMI Headquarters, California

6. Ballot Results (1/2)Cycle 6 & 7 - 2016

7. Ballots to be Issued for N.A. Spring 2017 Meetings [1/2] Adjudication

8. Ballots to be Issued for N.A. Spring 2017 Meetings [2/2] Adjudication

9. SNARF(s) Approved by GCS in between TC Chapter Meetings • Revision to SEMI E95 -1101, Specification for Human Interface for Semiconductor Manufacturing Equipment. • Approved by GCS 12/22/2016 • SNARF #6124

10. SNARFs 3 Year Status • SNARF #5716 (03/31/2014) - Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS) • SNARF extended (till 3/31/2018)

11. 5-Year Review – ReapprovalBallots to be Issued in H1-2017 ** Subject for "Nonconforming Title" review. Please refer to the Procedure Manual Appendix 4 (page 76)

12. 5 Year Review – Inactive Standards • Standards to receive Inactive status • NONE

13. Task Force Status Updates [1/4] • Diagnostic Data Acquisition - Task Force • Seeking Co-Chair • Ballot Adjudication: • 6064 E121 – FAILED • New/Updated SNARF(s) • SNARF #6064 • Ballot Plans next cycles • 6064A • Energy Saving Equipment Communication – Task Force • No meeting during Standards Fall 2016 Meetings • Activities will resume at Standards Spring 2017 Meetings

14. Task Force Status Updates [2/4] • Generic Equipment Model 300 - Task Force • Seeking Co-Chair; • Ballot Adjudication • 5549 E30 Title Change - FAILED • 5872A E172 SEDD Update - FAILED • 6026 - FAILED • 6066 - FAILED • 6068 - FAILED • New/Updated SNARF(s) • 6026 • 6066 • 6068 • New Large PP Transfer • Ballot Plans next cycles • 5549A • 5872B • 5738 E87.1 Provisional • 6066A

15. Task Force Status Updates [3/4] • Process Control Systems - Task Force • No leadership changes • No ballots adjudicated • Discussions on ballot 5716 for updates to E133 and E133.1 • Motion approved to ballot in Cycle 2 2017 • Potential to pursue additional standardization in Virtual Metrology once International Roadmap for Devices and Systems (IRDS) comes out with their virtual metrology white paper. • Sensor Bus - Task Force • No leadership changes • Ballots adjudicated • Ballot 6067 (reapproval) • New business • Reapprovals per direction from the I&CC

16. Task Force Status Updates [4/4] • Graphical User Interfaces – Task Force • Leader: Frank Summers (ISGI) • New TFOF approved during SEMICON West 2016 • First meeting during Fall 2016 • Reviewed & discussed GUI TFOF activities development plan • Defined the scope for major revision to SEMI E95 • Updated new SNARF for E95 revision • New SNARF(s): • Revision to SEMI E95-1101-0307R, Specification for Human Interface for Semiconductor Manufacturing Equipment • SNARF will be resent to global members for 2-week review and GCS for approval • Ballot Adjudication • None • Ballot Plans Next Cycles • None

17. Next Meeting Schedule The next N.A. Information & Control Standards Meetings are tentatively scheduled* for April 3 – 5, 2016 at SEMI Headquarters in California in conjunction with the N.A. Standards Spring 2017 Meetings. Exact meeting date and details will be announced when finalized and available at http://www.semi.org/en/standards-events Monday, April 3, 2017, SEMI HQ • NA I&C Leadership (12:00 Noon – 1:00 PM) • DDA (1:00 PM – 3:00 PM) • PCS (3:00 PM – 5:00 PM) • I&C GCS (5:00 PM – 5:30 PM) Tuesday, April 4, 2017, SEMI HQ • I&C GUI TF (9:00AM – 5:00 PM) • Energy Saving Equipment Communication (9:00 AM – 12:00 noon) • GEM300 (1:00 PM – 4:00 PM) • Sensor Bus (4PM – 6:00 PM) Wednesday, April 5, SEMI HQ • I&C Committee (8:00 AM – 4:30 PM) *All times are in Pacific Time. Times and dates are subject to change without notice.

18. Thank you!For more information or to participate in N.A. Information & Control TC activities, please contact Inna Skvortsovaat SEMI (iskvortsova@semi.org)