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Applications of Plasma-Based Processes in Medicine

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Applications of Plasma-Based Processes in Medicine

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    1. Applications of Plasma-Based Processes in Medicine Andranik Sarkissian PLASMIONIQUE & INRS

    2. Outline Introduction Plasma-Based Processes Plasma and Vacuum Based Processing Tools Examples of Applications

    3. Advances in Medical Field

    4. Role of Plasma-Based Processes

    5. How Biomaterials Field Benefits from Plasma Technology The Non-Equilibrium State of Plasma Allows Development of New Material Coatings Not available by Conventional Means Charged particles Can Be Manipulated by External Fields in Order to Impart a predetermined energy on the Material surface thus influencing the film Characteristics Highly Controlled deposition and removal rates Higher kinetic energy of impinging particles on the surface allows reducing the process temperature

    6. Plasma-Based Processes Implantation (1) Sputtering (2) Etching (3) Deposition Physical (4) Chemical (5,6) Others Arc evaporation e-beam Laser ablation

    7. Ion Implantation (conventional)

    8. Ion Implantation (conventional) Plasma Created Ions extracted from plasma Ions accelerated to high energy Ions Mass Separated Magnetically Selected Ions Implanted

    9. Ion Implantation (Plasma-Based) Plasma Created Object Immersed in Vacuum With Potential Distribution Grid Without PDG Plasma Created Pulsed or CW Object Biased to Negative Voltage Pulsed or DC

    10. Typical Applications of Ion Implantation Implantation of biocompatible atoms into the surfaces of non-biocompatible materials (e.g. carbon atoms into metallic components of heart valves) Implantation of radioisotopes into ceramic and metallic prosthesis (for treatment of cancer or cardiovascular diseases) Implantation of Oxygen, Nitrogen, Calcium and Phosphorous into Ti based prosthesis to improve the surface hardness

    11. INRS Plasma-Based Ion Implantation System

    12. Microwave Plasma Source

    13. Experimental Characterization Operation Pressure 0.2 to 2 mTorr (Ar Plasma) Pulsed Microwave Source 300 W peak Power Different modes (high and low density) Pressure Dependent Parabolic Density profile Peak density 4*1011 cm-3 (well above the cut off density) at absorption Zone Peak Electron Temperature is about 9 eV

    14. Nitriding Ti nitriding using plasma based implantation XPS profilometry Nanoindentation tests Surface hardness Increased from 3.2 GPa to 5.8 GPa

    15. Ni-Ti film Ni sputtered Ni Deposited on Ti Ni Implanted in Ti Ar Ion Mixing

    16. Microwave Plasma Sources Microwave Discharge Remote Plasma (developed by Plasmionique) Wide Operation Pressure range (5 mTorr to 5 Torr) Modification of Polymer Films Functionalization Grafting Deposition of Polymeric films

    17. RF Plasma Source Developed by Plasmionique

    18. Experimental Substrate cleaned with Ar plasma discharges Substratre to plasma distance of 17 cm Pressure in the chamber 30 mtorr Active Gas +Argon Gas RF Power 600 W Active cooling -> Substrate temperature 15 C Deposition Rate is 300 Å/min Hard Films deposited (Si, Al, Ti) Were Stable (after 4 months exposed to atmosphere) Hardness > 20 GPa

    19. Magnetron Sputter Deposition DC or RF Biasing Deposition of metal and dielectric materials Higher particle energy Improved adhesion

    20. Parylene Coatings Parylene is the generic name for poly-para-xylylene, a completely linear, highly crystalline material Vapor Deposition in Vacuum (conformal coating) Excellent Dielectric (> 5000 V/mil) Excellent Strength (Yield & Tensile strength > 8000 psi) Highly stable (Insoluble in most Solvents) Biocompatible Water absorption (<0.1% in 24hrs)

    21. Parylene Deposition Process

    22. Applications Coating of Biomedical Implants Pacemakers Defibrillators Medical Devices Forming Mandrels, Catheters and Guide Wires Sensors and Transducers Stents Probes and Electrodes etc

    23. Summary Plasma Based Processes have become one of the most important elements that contributes to the rapid advancement of medical technologies. They contribute to both manufacturing and surface treatment of Implantable Medical devices, prosthesis and their delivery tools.

    24. Thank you for your Attention

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