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S-RCAT(Sphere-shaped-Recess-Channel-Array-Transistor) Technology for 70nm DRAM feature size and beyond. J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology Wookhyun Kwon. This is a story about…. How to solve a difficult problem of DRAM technology.
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S-RCAT(Sphere-shaped-Recess-Channel-Array-Transistor) Technology for 70nm DRAM feature size and beyond J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology Wookhyun Kwon
This is a story about…. How to solve a difficult problem of DRAM technology. It was a great idea like the Egg of Columbus. Egg of Columbus
DRAM Operation Storage Capacitor Gate Bit Line Vstorage = Qc / Cstorage Key of DRAM operation • How long the storage node maintain the stored charge? Target >100msec
Motivation: Data Retention Time Issue • Scaling Rule Xj DIBL GIDL Junction Leakage • Channel length scaling is a necessity for small cell size. But… • Short channel Enhance DIBL • Thin gate oxide Enhance GIDL • High Nsub & Shallow junction depth Increase junction leakage. • We could not obtain sufficient data retention time near 100nm tech. How to solve this problems?
Suggested Solutions • High Tech. • High-K material (for Gox and Storage cap.) • Increasing Cs • Thick gate oxide • SOI (Silicon on Insulator) • Reduce DIBL Increasing Fab. Cost!
Simplest way is… Making a long channel length in same area. • Planar • RCAT Xj RCAT (Recessed Channel Array Transistor) DRAM (512Mb, ’03) • Long effective channel length & Deep junction depth. • Improve refresh characteristics
1st Generation RCAT • RCAT Scaling Recess Depth But, by increasing recess depth • Sharp curvature problem Gox reliability • Uniformity • Neck part enlargement Chemical Dry Etching
2nd Generation RCAT= S-RACT Poly Void S-RCAT (Shere-shaped RCAT) DRAM (2Gb, ’03) • Larger effective channel length • Larger curvature small vertical field suppress GIDL • Small junction depth
Process Sequence Isotropic Dry Etching Oxide spacer Key Process • Oxide spacer for protecting Si-neck-enlargement • Isotropic dry etch (Low power silicon etch) • Steam RTP oxidation or Plasma oxidation
Electrical Characteristics • Good uniformity of Vth (250mV) • Improving DIBL (80mV 40mV) • Smaller junction leakage • Improving data retention time
DRAM Cell Size Trend S-RCAT We are now here! Who? Source (IRTS 2006) • 46nm (Half pitch) • 6F2 • S-RCAT
Summary • In DRAM technology, the data retention was the big problem. • Using RCAT structure, we could solve the problem by increasing the effective channel length in same cell size. • It don’t need a significant high-technology. • The great idea comes from very simple idea.
Thank you. Questions?
More Scaling • S-RCAT has a good scalability to sub-50nm. • Below 40nm, the isolation between balls (C ) will be a limiter. • for further scaling below, another breakthrough in technology is needed.
6F2 Architecture • 25% cell size reduction The 6F2 architecture have • Diagonal direction of channel • Non-planar channel (RCAT) Source (Samsung)