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Magnetic Nanofluidics ME342 Design Project Update 3

Magnetic Nanofluidics ME342 Design Project Update 3. Abhishek Dhanda Kwan-Kyu Park Michael Pihulic Katherine Tsai July 27, 2006. Equipment Training. Completed Katherine: STS2 Abhishek: Metallica Kwan-Kyu: P-5000 Pending WBGEN for gold liftoff Drytek 1 and 4 Super Users

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Magnetic Nanofluidics ME342 Design Project Update 3

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  1. Magnetic Nanofluidics ME342Design Project Update 3 Abhishek Dhanda Kwan-Kyu Park Michael Pihulic Katherine Tsai July 27, 2006

  2. Equipment Training • Completed • Katherine: STS2 • Abhishek: Metallica • Kwan-Kyu: P-5000 • Pending • WBGEN for gold liftoff • Drytek 1 and 4 • Super Users • J Provine

  3. Process Update

  4. Progress • Masks • Chrome Masks • Berkeley staff on vacation • Fabricated by Photo Sciences in Torrance, CA • Sent in GDSII files 7/19 • Masks received 7/25, next day shipping • Costs : $380 / Mask • E-beam • Test runs starting Friday • Layouts completed

  5. Progress • Materials • Wafer Inventory • 5 SOI’s • 18 Primes • Tweezers • Carriers

  6. Progress • Characterization • STS2 • Characterize etch rate of poly-Si and Si (microchannels) • 4 primes with polysilicon • P5000 • Characterize etch rate of poly-Si (nanochannels) • Metalica • Characterize film thickness precision • 1 prime • Front side lithography • 1 um SPR3612 • Exposure times= approx 1.8 sec • 8 primes, with Front Side Etch mask

  7. Emergent Problems • Equipment (past or present or future?) down • STS1 --> Solution: STS at Berkeley • Karl Suss • Tylan1 • Dektak (gold contaminated) • Fluorescence microscope in Kovac’s labs • Depending on strength of our signal may need filters to improve selectivity • Filters cost a lot ($1000 each) • Access to Prof. Santiago’s micro-PIV setup?

  8. Emergent Solutions • Mask issues at both SNF and BSAC resolved by using Photo Sciences • Metal tweezers in stock! • How will we do litho on pyrex wafer? • Unable to selectively etch • Anodically bond devices individually

  9. Future Work • Current week • Characterizing P-5000 for polysilicon etch • Characterizing Metallica for gold sputtering • Oxide etch with P-5000 for backside etch using STS in Berkeley. • Send in 2nd mask set (where?) • Ebeam patterning • Next week • Finish microchannels device fabrication • Begin testing

  10. Lessons Learned • Put photoresist on the correct side. • Nighttime is good time for processing. (Midnight~5AM)

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