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Global Warming Science: Status and Statistics

Global Warming Science: Status and Statistics. Phyllis Pei Walter Worth Sematech  1999 Arizona Board of Regents for The University of Arizona. Perfluorocompounds (NF 3 , SF 6 , C 2 F 6 , CF 4 , CHF 3 ). Have long atmospheric lifetimes Stable, non-toxic Strong infrared absorbers

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Global Warming Science: Status and Statistics

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  1. Global Warming Science: Status and Statistics Phyllis Pei Walter Worth Sematech  1999 Arizona Board of Regents for The University of Arizona

  2. Perfluorocompounds (NF3, SF6, C2F6, CF4, CHF3) • Have long atmospheric lifetimes • Stable, non-toxic • Strong infrared absorbers • Continuing emissions will likely accumulate with unknown consequences • Some, such as C2F6, are made solely for use in semiconductor manufacturing • Most PFC gas is not “consumed” in the etch and CVD processes

  3. Key Greenhouse Gases Affected by Human Activity ATMOSPHERIC CONCENTRATION NOTE: H2O has largest greenhouse effect, but is not affected by human sources and sinks

  4. PFC Lifetimes and GWPs GWP = Global Warming Potential @ 100 year time horizon Source: IPCC

  5. Global Warming Potential (GWP) The following equation is used to calculate GWP: t  a i c i dt 0 GWPt= t a c dt  co2 co2 0 where: a1 = the instantaneous radiative forcing resulting from a unit increase in the atmospheric concentration of trace gas, i c1 = concentration of trace gas, i, remaining in the atmosphere at time, t, after release of unit mass at t=0 t = number of years over which the calculation is performed

  6. Million Metric Tons Of Carbon Equivalents (MMTCE) MMTCE= 12 x Kg x GWP100 44 109 GWP100 = global warming potential at 100 yr. time horizon Kg = weight of PFC emitted

  7. Global Warming Calculations Wavelength & Molecular Size & Lifetime [ Rad. Forcing & Conc. & Time ] {[GWPt] & Mass } {Million Metric Tons Carbon Equivalent }

  8. U.S. Greenhouse Gas Emissions Each source, although small, contributes to the whole

  9. PFC Emissions/Use Chart Data Source: EPA & Dataquest Tons/year

  10. 1993 PFC Purchases (U.S. Semiconductor Industry) 1993 Purchases of PFCs (metric tons)

  11. Chronology - PFC Technology Development 1994 - Tested first commercial PFC thermal destruction device (Delatech’s CDO) - Alzeta develops and installs first inwardly-fired burner at SEMATECH - MIT starts screening PFC alternative chemicals 1995 - Alzeta licenses burner technology to Edwards - IBM demonstrates 50% C2F6 reduction by process optimization

  12. Chronology - PFC Technology Development (Cont’d) • - Edwards develops and SEMATECH tests prototype burnbox • - MIT successfully destroys destruction of PFCs in microwave reactor • - Novellus and 3M develop C3F8 as C2F6 replacement • 1996 - Beta testing of PFC capture technologies • Air Products/Radian at TI • Air Liquide at TI • BOC at IMEC

  13. Chronology - PFC Technology Development (Cont’d) • - Schumacher unveils potential PFC alternative (TFAA) • - C3F8 is being evaluated in fabs at TI and AMD as drop-in replacement for C2F6 • - Edwards improves burnbox to destroy CF4, tested at Motorola • - DuPont announces PFC replacement studies

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