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Production of 8x8 SiPM matrices

Production of 8x8 SiPM matrices. C.Piemonte , M. Melchiorri, A. Piazza, A. Tarolli, N. Zorzi. FBK – Fondazione Bruno Kessler, Trento, Italy piemonte@fbk.eu. Production: September – December 2008 12 wafers 5 with standard process 7 with different oxide thickness. layout.

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Production of 8x8 SiPM matrices

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  1. Production of 8x8 SiPM matrices C.Piemonte, M. Melchiorri, A. Piazza, A. Tarolli, N. Zorzi FBK – Fondazione Bruno Kessler, Trento, Italy piemonte@fbk.eu

  2. Production: September – December 2008 12 wafers 5 with standard process 7 with different oxide thickness

  3. layout • 8x8 array • 1.5mm element pitch • read-out on one side C B A 1.3cm 1.3cm Our largest area monolithic array.

  4. A B C Lettura su 1 lato Gap per linee metal: 200um Lettura su 1 lato Gap per linee metal: 300um Lettura su 2 lati

  5. Misure IV automatichesututti glielementidegli array.

  6. Risultati 5 con standard process. Esempio IV matrice 7 con diverso ossido. Esempio IV matrice Corrente post BD elevata OK

  7. Risultati Su tutte le fette il difetto piu’ comune e’: working SiPM. The current can be roughly modeled as I=q*DC*G Vbd SiPM with 1 defective cell. The current can be modeled as I=(V-Vbd)/Rq

  8. DaSiPM2 Arrays, IV Mappa delle tensioni di breakdown Rosso=dispositivi a BD basso 8 array totalmente funzionanti

  9. Altro esempio con resa piu’ bassa 0 array totalmente funzionanti

  10. Conclusioni Tra le 5 fette a corrente migliore abbiamo estratto: 32           matrici con tutti elementi funzionanti22           con 1 elemento non funzionante8             con 2 elementi non funzionanti

  11. Connessione 3D • Deep RIE finalmente OK. • Iniziato R&D: • Disegnato maschera per realizzare i fori; • Pensato a possibili strategie per la connessione • all’interno del foro. • Il secondo punto non e’ banale!!

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