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Eiko IB-3 sputter coater APPLIED PHYSICS LETTERS 89, 243117 (2006). MRS Fall 2008. JEOL JFC-1300 fine coater Chem. Commun ., 2008, 691–693 (2008).
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Eiko IB-3 sputter coater APPLIED PHYSICS LETTERS 89, 243117 (2006) MRS Fall 2008 JEOL JFC-1300 fine coater Chem. Commun., 2008, 691–693 (2008)