ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: Piezoelectric Actuators

1. ECE5320 MechatronicsAssignment#01: Literature Survey on Sensors and Actuators Topic: Piezoelectric Actuators Prepared by: Andrew Moss Dept. of Electrical and Computer Engineering Utah State University 2/18/2008

2. Outline • Reference list • Major applications • Basic working principle illustrated • Application notes • Major specifications • Advantages • Limitations ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

3. References • http://www.physikinstrumente.com • Overview and tutorials • http://www.mide.com/products/qp/qp45n/qp45n_faq.php#1 • Quick FAQ list • http://www.pi-usa.us/technotes/Actuator2006_SurveyoftheVariousOperatingPrinciplesofUltrasonicPiezomotors_c.pdf • Background on piezomotors • http://www.rti.org/page.cfm?nav=126 • Various papers on sensors and actuators ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

4. Major applications • Data Storage • MR head testing • Spin stands • Disk testing • Active vibration cancellation • Pole-tip recession test • Semiconductors, Microelectronics • Nano & Microlithography • Nanometrologie • Wafer and mask positioning • Critical-dimension-test • Inspection systems • Active vibration cancellation • Life Science, Medical Technology • Scanning microscopy • Patch clamp • Nanoliter pumps • Gene manipulation • Micromanipulation • Cell penetration • Microdispensers ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

5. Major Applications • Precision Mechanics • Fast tool servos • Active vibration cancellation • Structural deformation • Tool adjustment • Wear compensation • Needle-valve actuation • Micropumps • Linear drives • Knife edge control in extrusion tools • Micro engraving systems • Shock wave generation • Optics, Photonics, Nanometrologie • Scanning mirrors • Image stabilization, pixel multiplication • Scanning microscopy • Auto focus systems • Interferometry • Fiber optic alignment • Fiber optics switching • Adaptive and active optics • Laser tuning • Stimulation of vibrations ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

6. Piezoelectric Material • Piezoelectric materials when strained produce and electric charge, and when in an electric field exhibit mechanical deformation: • Single crystals • Lithium sulfate, Rochelle salt, quartz, turmaline and LiNbO3 • Ceramics • Lead zirconate titanate (PZT), Barium titanate, ZnO • Polymers • Poly(vinylidene fluoride) ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

7. Piezoceramics • Piezoceramics are the most commonly used materials for piezoelectric actuators because they can be built to exhibit greater deformation. • Ceramics often must be ‘poled’ to align the magnetic dipoles before they exhibit the piezoelectric effect Diagram from: www.physikinstrumente.com a) before poling, b) during poling, c) after poling ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

8. Basic Working Principle Diagram from: www.physikinstrumente.com Piezoelectric materials all have a crystalline structure as shown. When a voltage is applied across the structure deformation of the crystals occurs, ie a voltage is changed into physical motion of the crystal. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

9. Basic Working Principle Diagram from: Yeddula, Shashidhar ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

10. Basic Working Principle Diagram from: www.physikinstrumente.com Peizoceramic disc actuator. Expansion and contraction in response to applied voltage U. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

11. Basic Working Principle Piezoceramic disks are stacked together in order to provide a larger range of motion. Diagram from: www.physikinstrumente.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

12. Basic Working Principle Cantilever stacks to increase the force of the lever. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

13. Application Notes Piezoelectric bimorph actuator serial and parallel configurations. The inverse piezoelectric effect causes bending to occur, can be either direction depending on voltage input. Diagram from: www.physikinstrumente.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

14. Application Notes Diagram from: www.physikinstrumente.com Piezoelectric actuator used as a micro-switch. Expansion and contraction of the piezo stack opens and closes the switch. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

15. Application Notes Closed-loop mechatronic system utilizing a peizoelectric actuator Diagram from: www.physikinstrumente.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

16. Application Notes Diagram from: K. Spanner, Survey of the Various Operating Principles of Ultrasonic Piezomotors ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

17. Major Specifications • Displacement • Blocking force • Stiffness • Electrical capacitance • Resonant frequency • Operating voltage ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

18. Advantages • Unlimited resolution • Fast response time • High force generation • No EMC/ECI issues • Low power consumption • No moving parts to wear out • Wide range of operating temperatures ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

19. Limitations • Brittle, very susceptible to shear loads • Hysteresis • Drift • Loss of polarization (aging) ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators