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3D Diamond detectors fabrication and Characterization

3D Diamond detectors fabrication and Characterization . B.Caylar 1 , M.Pomorski 1 , D.Tromson 1 , P.Bergonzo 1 , J.Alvarez 2 , A.Oh 3 ,C. Da Via 3 , I.Haughton 3 , V.Tyzhnevy 3 , T.Wengler 4. 1 CEA-LIST, French Atomic Energy Commission, France

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3D Diamond detectors fabrication and Characterization

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  1. 3D Diamond detectors fabrication and Characterization B.Caylar1, M.Pomorski1, D.Tromson1, P.Bergonzo1, J.Alvarez2, A.Oh3,C. Da Via3 , I.Haughton3, V.Tyzhnevy3, T.Wengler4 1CEA-LIST, French AtomicEnergy Commission, France 2Laboratoire de Génie Electrique de Paris , France 3University of Manchester, School of Physics and Astronomy, Manchester, UK 4CERN, 1211 Geneva 23, Switzerland Workshop on 3D Sensors and Micro Fabrication Systems CERN – 16/11/2012

  2. Context • Why 3D? • Planar geometry • QMIP = 18000 e-h pairs • 3D geometry • QMIP= 18000 e-h pairs 50µm 500µm CCE drops by 53% CCE drops by 5% • Analyticallycalculatedcharge collection Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  3. Graphiticelectrodes • Processimprovement over the past 2 years Dec 2010 100µm Feb 2011 • YAG Laser • Hollow, conicalshape • Diameter: 100µm • Pitch : 300µm • UV Laser + x10 Lens • Diameter: 75µm • Pitch : 200µm • UV Laser + x20 Lens • Diameter: 20µm • Pitch : 150µm 100µm 100µm Jun 2011 Apr 2012 Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  4. Graphiticelectrodes • UV Laser setup • Electrodes are processedusing laser-inducedgraphitization • Wavelength : 337nm • Repetition rate : 30Hz • Pulse length : 3ns • Spot size : 15µm MicroscopeLens Sample holder XYZ Motorized stage Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  5. 3D diamond detector – UV laser processed • Fabrication steps • Cleaning OpticalMicroscopy • Graphitization Crossedpolarizers • Photolithography Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  6. 3D diamond detector – UV laser processed • Characterizationusing synchrotron micro-beam Global Mapping - 15keV photons - 3µm spot Single crystalprocessedwith UV laser (200µm pitch) Synchrotron µ-beam 300µm 300µm • HV = -40V Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  7. 3D diamond detector – UV laser processed • Characterizationusing synchrotron micro-beam Side raster scan - 15keV photons - 3µm spot Single crystalprocessedwith UV laser (200µm pitch) Huge crack 300µm 300µm • HV = -40V Synchrotron µ-beam • Charge iscollectedwithin the wholethickness Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  8. 3D Diamonddetector – UV laser processed • Summary Wemanaged to… • ProduceconductivegraphiticelectrodeswithUV laser • Looks likethiselectrodesallow charge collection But… • Processwasunstable and canrandomlygenerates cracks So wedecided to improve micro machiningby usinganotherkind of laser… Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  9. 100µm Fs-processedBurriedelectrodes • Laser setup and fabrication Processimprovement over the pasttwoyears Dec 2010 100µm Feb 2011 • Femtosecondlaser • Diameter: 5µm • Pitch < 35µm • UV Laser + x20 Lens • Diameter: 20µm • Pitch : 150µm Jun 2011 Apr 2012 Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  10. Fs-processedBurriedelectrodes • Laser setup and fabrication • Electrodes are processedusing laser-inducedgraphitization • Wavelength : 800nm • Repetition rate : 1kHz • Pulse length : 100fs • Spot size : 10µm Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  11. Fs-processedBurriedelectrodes • Structural characterization • Electrode Raman Analysis • Diamond • Border EHT = 5kV WD = 4.9mm Mag = 11.85k X Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  12. Fs-processedBurriedelectrodes • Structural characterization Electrode mappingusingConductive probe AFM J.Alvarez, LGEP 200 kΩ 1µm 1µm ρ ~ 1 Ω.cm • AFM mapping • Resistancemapping • Resistance distribution in the mapping area Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  13. 3D Diamonddetector - Fs-laser processed • Summary Wemanaged to… • Produceelectrodeswithsuitable dimensions for detectors applications • Check thatsuchelectrodes are graphitic, conductive and reproducible Now Alex isgoing to presentyousomebeam time results… Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  14. Thanks for your attention ! Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  15. Fs-processedBurriedelectrodes • Whyisfemtosecond laser somuchbetter ? • A two-step process • Producing a graphitic seed at the surface • Excitation of a large number of valence electrons via multi-photon absorption • Energybarrierdecreases • Phase transition Diamond- Graphite • Propagation of laser supported graphitic wave No heataccumulation T.V. Kononenko et Al – Rus’nanotech (2010) Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

  16. Burriedelectrodes • Whyisfemtosecond laser somuchbetter ? • A two-step process • Producing a graphitic seed at the surface • Excitation of a large number of valence electrons via multi-photon absorption • Energybarrierdecreases • Phase transition Diamond- Graphite • Propagation of laser supported graphitic wave No heataccumulation Energybarrierdecrease Multi-Photon Absorption C.Z. Wang et Al -Phys. Rev. Lett. 85, 4092 (2000) T.V. Kononenko et Al – Rus’nanotech (2010) Workshop on 3D Sensors and Micro Fabrication Systems| 16 NOV 2012

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