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An Introduction to SIMS and the MiniSIMS ToF

An Introduction to SIMS and the MiniSIMS ToF. © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com. Secondary Ion Mass Spectrometry (SIMS) & The Millbrook MiniSIMS. The SIMS Process. simulation courtesy of Dr Postawa Zbigniew

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An Introduction to SIMS and the MiniSIMS ToF

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  1. An Introduction to SIMS andthe MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com

  2. Secondary Ion Mass Spectrometry (SIMS)&The Millbrook MiniSIMS

  3. The SIMS Process simulation courtesy of Dr Postawa Zbigniew at the Jagiellonian University in Poland

  4. A Conventional SIMS System

  5. The MiniSIMS Instrument

  6. Design Objectives • Increase routine use of Surface Analysis • more affordable • more accessible • Not a replacement for conventional SIMS • not state-of-the-art performance • restricted analysis conditions

  7. Transform one of these …..

  8. ….. into one of these.

  9. Operational Strengths • Low Capital & Running Costs • Fast, On-Site Analysis • Compact Design, Single Electrical Supply • Full Automation & Control for Ease of Use • High Reliability • Rapid Sample Throughput • Simplified Data Interpretation • Remote Control via Internet

  10. Surface Coatings Surface Treatments Electronic Components Semiconductors Electrodes & Sensors Catalysts Adhesives Lubricants Packaging Materials Corrosion Studies Typical Application Areas

  11. Alternatives to a MiniSIMS ? • No Other Benchtop SIMS Instrument • Conventional SIMS Systems • much more complex and expensive • Contract Analysis Laboratories • not convenient, contamination during transport • Other Surface Analysis Techniques • generally less sensitive

  12. Comparison of SEM / EDS and SIMS

  13. Advantages of SEM / EDS • High magnification physical image • Quantitative elemental information

  14. Advantages of SIMS • Surface specific analysis • Organic structure identification • Profiling for depth distribution • Light element detection

  15. For many applications surface sensitivity is needed… EDX sampling depth is typically 1 micron 509 m Not 100 x Not 10 x But 1000 x – SIMS can offer true surface analysis

  16. Conclusions • SIMS & EDS give complementary information • SIMS has advantages for • Organic surface contamination • 3 dimensional analysis of multi-layer structures • SEM / EDS has advantages for • High magnification physical imaging • Quantitative analysis

  17. MiniSIMS ToF

  18. Typical Applications for the MiniSIMS ToF • Analysis of unknown samples (failure analysis) • Analysis of unique samples • Improved analysis of organic materials • Smaller area static SIMS analysis • Retrospective experiments

  19. MiniSIMS ToF • Advantages over Quadrupole Instrument • Smaller area static SIMS analysis • Extended mass range • Higher mass resolution (organic v inorganic) • Retrospective experiments

  20. MiniSIMS ToF • Use of Continuous Primary Beam • Fast analysis (= low cost per sample) • No loss of image resolution in pulsing • Simplified depth profiling (single beam) • Fast & simple static / imaging / dynamic SIMS in one instrument

  21. Static SIMS (Surface Analysis)

  22. Polycarbonate (Bisphenol–A)

  23. Structurally significant peaks Characterisation of Layer

  24. Structurally significant peaks Characterisation of Layer

  25. Effect of Decreasing Area Mass Scale Analysis Area Dimension Quadrupole Data

  26. Effect of Decreasing Area Mass Scale Analysis Area Dimension Time of Flight Data

  27. Higher Mass Resolution

  28. Higher Mass Resolution

  29. Extended Mass Range K9I8

  30. Extended Mass Range ToF –ve ion mode: Irganox molecular ion at m/z = 1175 Da

  31. Imaging SIMS (Spatial Analysis)

  32. Surface Organic Contaminant Analysis

  33. Retrospective Analysis

  34. Retrospective Analysis

  35. Retrospective Analysis

  36. Dynamic SIMS (Depth Analysis)

  37. Multi-Layer Coating(Three Dimensional Analysis)

  38. Retrospective Profiling

  39. Sodium high at surface Conventional Profile

  40. Sodium high at surface Sodium inclusion in layer Retrospective Cross-Section

  41. Retrospective Profiling

  42. Horizontal Image of inclusion Retrospective Analysis

  43. Summary

  44. MiniSIMS Summary • SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films • Information easily available by SIMS may be difficult or impossible by any other technique • SIMS is especially valuable for the detection of:- • organic species (e.g. silicones, fluorocarbons) • light elements (lithium, beryllium, boron …) • group IA & IIA metals, group VII halides

  45. MiniSIMS Summary • SIMS is a fast analysis technique, especially for imaging applications • MiniSIMS ToF is most effective for a comparative analysis of samples • Desktop MiniSIMS means SIMS is now affordable and accessible to all

  46. ToF MiniSIMS( v conventional ToFSIMS ) • Use of Continuous Primary Beam • Fast analysis (= low cost per sample) • No loss of image resolution in pulsing • Simplified depth profiling (single beam) • Fast & simple static / imaging / dynamic SIMS in one instrument • Upgrade path from Quadrupole to TOF

  47. ToF MiniSIMS( v quadrupole MiniSIMS ) • Improved Static SIMS from smaller areas • Retrospective Experiment • 2D Imaging • 3D Imaging / Depth Profiling • Extended Mass Range • Higher Mass Resolution

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