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Assembly and Testing of a MEMS Mirror for Endoscopic OCT

This project aims to develop a smaller, 360º rotating mirror that can fit inside a 1mm diameter probe for endoscopic optical coherence tomography (OCT). The current rotating devices will be cut in size, allowing for more precise imaging in trachea, GI tract, and blood vessels.

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Assembly and Testing of a MEMS Mirror for Endoscopic OCT

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  1. Assembly and Testing of a MEMS Mirror for Endoscopic OCT IMSURE Fellow: Dolly Creger Mentor: William Tang Graduate Student: Jessica Ayers

  2. Definitions Microelectromechanical Systems (MEMS)- micron-scale devices linking mechanical parts to electrical components. Optical Coherence Tomography (OCT)-Imaging technology which uses infrared light to image cross-sections of biological tissue with micron scale resolution. Chemical Vapor Deposition (CVD)-A process in which a controlled chemical reaction produces a thin surface film. Photoresist-A light sensitive coating that is used to transfer the image of a mask onto the surface of a wafer, followed by a reactive ion etch (RIE). Stiction-The surface tension of liquid on MEMS components. Shear Mode Quartz- A piezoelectric effect in a lateral plane.

  3. Realm of Biomedicine • Coronary RestenosisLaryngeal cancer, Barrett’s Esophagus. • OCT for noninvasive techniques for cancer screening. • Majority of research lies in linear OCT. • Trachea, GI Tract, or blood vessels require a rotary laser beam. • 360º rotating devices are currently limited by the size of the motor. Fig 1. coronary artery comparison www.lightimagin.com Fig 2. coronary artery restenosis www.lightlabimaging.com Fig 3. Mouse Trachea www.lightimaging.com

  4. We are working on a different kind of micromachine…

  5. Simple Micro Machine Fig 4. SEM Image: Dolly Creger

  6. Our Project • Develop a smaller 360º rotating mirror that can fit inside a 1 mm diameter probe. • This will cut the size of the current rotating devices in half.

  7. 1 mm Endoscopic Probe Fig 5. Conceptual drawing of endoscopic probe. Jessica Ayers UCI

  8. Metal Poly 2 2nd Oxide Poly 1 1st Oxide Poly 0 Silicon Nitride Silicon Fabrication Commercial PolyMUMPs Process

  9. L-Edit 592 µm x 527 µm 990 µm x 941 µm

  10. Mirror Stiction Fig 4 and 5. Mirror Assembly Jessica Ayers UCI Assembly

  11. Scratch Drive 520 µm diameter Fig 6 and 7. Scratch Drive Array Jessica Ayers UCI 876 µm diameter • Electrothermal Actuators • Microvibromotors, Electrostatic Micro Conveyer, Dipole Surface Drive Microengine • Electrostatic Linear Inchworm Motors • Ultrasonic/Magnetic Actuators

  12. Stepping motion of the SDA: • Electrostatic load deflects the plate. • Bushing is scratched forward. • Voltage is reduced and the plate is pulled forward.

  13. Results Scratch Drive: ~200V .5-1.5 Hz Stiction a. Evaporation b. Instantaneous vaporization c. Leave submerged Assembly a. Probe Station b. Microspatula c. Magnetism

  14. Future Work Stiction • Continuous laser to vaporize all the liquid instantaneously • Backside Etching • Shear Mode Quartz Assembly • Thicker Ni Coating • Photoresist Hinges Fig 8. Absorption of silicon and water, Jessica Ayers UCI

  15. Special Thanks! • National Science Foundation • UROP-IMSURE • Said Shokair • Jerry McMillan • UCI • INRF • Goran Matejasevic • Professor Willliam Tang

  16. Jessica Ayers • Charlie Wen • Gloria Yang • Le "Yanni" Yan

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