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NC Applications in Manufacturing. GSNU. CMP (Chemical Mechanical Polishing). Wafer carrier. Polishing plate. Toyoda Float Polishing Machine Table Speed: 100 RPM Wafer Carrier Speed: 75 RPM Down Pressure: 5 psi. Process Setup. Wafer carrier view. Side view. Wafer-Pad Contact.
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CMP (Chemical Mechanical Polishing) Wafer carrier Polishing plate Toyoda Float Polishing Machine Table Speed: 100 RPM Wafer Carrier Speed: 75 RPM Down Pressure: 5 psi GSNU- Dept. of Mechanical and Aerospace Engineering
Process Setup Wafer carrier view Side view GSNU- Dept. of Mechanical and Aerospace Engineering
Wafer-Pad Contact Small Film Thickness Increasing Line Density Large Film Thickness GSNU- Dept. of Mechanical and Aerospace Engineering
고에너지빔 공정 • 레이저빔(LBM) • 전자빔가공(EBM) • 플라즈마빔가공(PBM) GSNU- Dept. of Mechanical and Aerospace Engineering
레이저빔가공(LBM) Laser Beam Machining <주요 특징> (1) 정확도, 반복도, 자동화의 용이성 (2) 광섬유의 활용으로 유연화 (3) 간단한 고정구, 짧은 설치시간, 컴퓨터제어 (4) 사용에 주의 GSNU- Dept. of Mechanical and Aerospace Engineering
<적용분야> (1) 전자, 자동차산업 – 절단, 드릴링 (2) 용접작업 (3) 표면처리 (4) 마킹 GSNU- Dept. of Mechanical and Aerospace Engineering
cutting Heat treating welding Cladding(피복) GSNU- Dept. of Mechanical and Aerospace Engineering
kiss-cutting engraving perforating Marking-rubber Applications GSNU- Dept. of Mechanical and Aerospace Engineering
slitting showerhead Web-processing Applications GSNU- Dept. of Mechanical and Aerospace Engineering
NC Control GSNU- Dept. of Mechanical and Aerospace Engineering
Laser - Galvanometer Control GSNU- Dept. of Mechanical and Aerospace Engineering
Backlight Unit Patterns 가공 영역 : 13”, 14”, 15” 등 폭 : 50 ㎛ ~ 250 ㎛ 깊이 : 25 ㎛ ~ 125 ㎛ 프리즘 각도 : 90도 가 광학적으로 이상적 GSNU- Dept. of Mechanical and Aerospace Engineering
Groove Shapes : V-cut vs. Laser V-cut Laser GSNU- Dept. of Mechanical and Aerospace Engineering
Material Effect on Pattern 압출성형 사출성형 GSNU- Dept. of Mechanical and Aerospace Engineering
Source CO2 Wavelength ( mm ) 10.6 Output Power (W) 0~50 Power Stability 5% Beam Size (mm) 0.34 Operation Mode Continuous Wave Mode Quality TEM00 Power Supply AC200V+10%, 50Hz Power Consumption (kW) 2.2 Test Result GSNU- Dept. of Mechanical and Aerospace Engineering
Optical Properties - 인쇄 방식에 비해 약 2~3배의 휘도 - 균일도는 패턴조정으로 달성가능 GSNU- Dept. of Mechanical and Aerospace Engineering