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North America Information & Control Technical Committee Chapter

Read the latest updates from the North America Information & Control Technical Committee Chapter, including leadership changes, meeting information, ballot results, and task force reports.

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North America Information & Control Technical Committee Chapter

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  1. North America Information & ControlTechnical Committee Chapter Liaison Report April 2017

  2. Outline • Leadership • Organization Chart • Meetings Information • Ballot Results • Upcoming Ballots / Ballots to be Reviewed during SEMICON West 2017 TC Meeting • SNARF(s) Approved by GCS in between TC Chapter Meetings • Old Business (5 Year Review and 3 Year SNARFs) • TF Reports • Proposed Meeting Schedule

  3. Leadership • Committee Co-chairs • Brian Rubow(Cimetrix) • Jack Ghiselli(Ghiselli Consulting) • James Moyne (AMAT/University of Michigan) • Leadership Changes • DDA Task Force new TF leader: • Albert Fuchigami (PEER Group)

  4. N.A. I&Cs TC Updated Organization Chart Legend C Chair/Co-Chair L Task Force Leader TF Task Force • North America • Information & Control • Technical Committee Chapter • C: Brian Rubow (Cimetrix) • C: Jack Ghiselli (Ghiselli Consulting) • C: James Moyne (AMAT/UMICH) Sensor Bus TF L: James Moyne (AMAT/UMICH) Diagnostic Data Acquisition (DDA) TF L: Brian Rubow (Cimetrix) L: Albert Fuchigami (PEER Group) Energy Saving Equipment Communication (ESEC) TF L: Mike Czerniak (Edwards) L: Andreas Neuber (AMAT) Process Control Systems (PCS) Architecture TF L: James Moyne (AMAT/UMICH) L: Chris Maloney (Intel) GEM300 TF L: Brian Rubow (Cimetrix) L: TBD Graphical User Interfaces (GUI) TF L: Frank H. Summers (ISGI) NOTE: Italics means group is currently inactive.

  5. Meeting Information • Last meeting • April 5, 2017 @ N.A. Standards Spring 2017 Meetings • SEMI Headquarters, Milpitas California • Next meeting • July 12, 2017 @ SEMICON West 2017 Meetings • San Francisco, California

  6. Ballot Results Cycle 1&2- 2017 * NA I&C Chapter voted to transfer ownership of SEMI E54.17 to Japan I&C TC

  7. Ballots to be Issued for N.A. SEMICON West 2017 Meetings Adjudication

  8. SNARF(s) Approved by GCS in between TC Chapter Meetings • Revision to SEMI E95 -1101, Specification for Human Interface for Semiconductor Manufacturing Equipment. • Approved by GCS 12/22/2016 • SNARF #6124

  9. SNARFs 3 Year Status • None needed extension.

  10. 5-Year Review – Reapproval Ballots Issued in H-2 2016 *SEMI E87.1-0707: Activity transferred from Korea I&C TC to NA I&C TC GEM300 TF (SNARF #5738) via GCS approval process on 08/24/2016.

  11. 5-Year Review – Reapproval Ballots to be Issued in H1 2017 ** Subject for "Nonconforming Title" review. Please refer to the Procedure Manual Appendix 4 (page 76)

  12. 5 Year Review – Inactive Standards • Standards to receive Inactive status • SEMI E54.16-1106 (Reapproved 1211), Specification for Sensor/Actuator Network Communications for LonWorks

  13. Task Force Reports [1/5] • Diagnostic Data Acquisition (DDA) - Task Force • New Co-Chair • Albert Fuchigami from PEER Group • An additional co-chair might be added next meetings • Meeting Discussion • EDA freeze 3 plan discussions • Coordination with the Korea DDA Task Force • Ballot Adjudication • FAILED - None • PASSED - 6064A - Superclean • New/Updated SNARF(s) • None • Ballot Plans Next Cycles • None

  14. Task Force Reports [2/5] • Energy Saving Equipment Communication (ESEC) – Task Force • Activities resumed at Standards Spring 2017 Meetings • Proposed SNARF for Line Items Revision to SEMI E167. Key points in provisional SNARF Draft: • Situation: The original standard was up to now not implemented in any fab. Besides that the communication standard between tool and subfab components has been released. • Purpose: It has to be checked whether the terminology and logic aligns between the two standards. Besides that it has to be reviewed whether there are any obstacles for implementation. • Simplify the state diagram so that it aligns with SEMI E175. • Make forecast available by Host to production equipment on energy-saving opportunities in the near future (e.g. for the next 2 hours or definable period of time). • Availability forecast should be chamber-specific (optional). • Clean-up the standard regarding detailed requirements; remove or make optional. • Distinguish between equipment and chamber states. • Plan submit SNARF for approval at Semicon West 2017 meeting • Next Step: plan to review SEMI E175 in 2018

  15. Task Force Reports [3/5] • Generic Equipment Model 300 (GEM300) - Task Force • Seeking Co-Chair; • Ballot Adjudication • FAILED • 5872A E172 SEDD Update • PASSED • 6066A-1, 6066A-2 E130 minor edit, E130.1 reapproval • 6068A-1, 6068A-2 E116 minor edit, E116.1 reapproval • 6026A E109, Line-item revision • 5738 E87.1 Major Revision to remove Provisional status • With 2 Editorial Change • 5549A GEM E30 title change/conformance organization • With 2 Editorial Changes • New/Updated SNARF(s) • None • Ballot Plans Cycle 5 • 5872C E172 SEDD Update • 6114 New Simple Large Recipe

  16. Task Force Reports [4/5] • Process Control Systems (PCS) - Task Force • Ballots adjudicated • Ballot 6067A (reapproval) • Passed • Authorized ballots • Revisions to SEMI E133 and SEMI E133.1 for Cycle 5-17 submission • Sensor Bus (SB) - Task Force • No leadership changes • Ballots adjudicated • Ballot 6116 (reapproval) • Withdrawn & to be referred to Japan sister task force • New business • New SNARF for adding a GENSen SDM mapping into E54.9.

  17. Task Force Reports [5/5] • Graphical User Interfaces (GUI) – Task Force • No leadership changes • SNARF6124, Revision to SEMI E95-1101-0307R, Specification for Human Interface for Semiconductor Manufacturing Equipment • Reviewed and discussed the specification to be reorganized and expanded • Discussed challenges related to small screen device displays and operating systems, i.e., tablet and smart phone form factors • First step, how the information displayed in the E95 Title Panel can be represented across all form factors • Ballot Adjudication • None • Ballot Plans Next Cycles • None

  18. Next Meeting Schedule The next N.A. Information & Control Standards Meetings are tentatively scheduled* for July 10-12, 2017 at San Francisco, California in conjunction with the N.A. Standards SEMICON West 2017 Meetings. Exact meeting date and details will be announced when finalized and available at http://www.semi.org/en/standards-events Monday, July 10, 2017, San Francisco, CA • NA I&C Leadership (12:00 Noon – 1:00 PM) • DDA (1:00 PM – 3:00 PM) • PCS (3:00 PM – 5:00 PM) • I&C GCS (5:00 PM – 5:30 PM) Tuesday, July 11, 2017, San Francisco, CA • I&C GUI TF (9:00AM – 12:00 noon) • Energy Saving Equipment Communication (9:00 AM – 12:00 noon) • GEM300 (1:00 PM – 4:00 PM) • Sensor Bus (4PM – 6:00 PM) Wednesday, July 12, San Francisco, CA • I&C Committee (8:00 AM – 14:00 PM) *All times are in Pacific Time. Times and dates are subject to change without notice.

  19. Thank you!For more information or to participate in N.A. Information & Control TC activities, please contact Inna Skvortsovaat SEMI (iskvortsova@semi.org)

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