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DRIE equipment purchase Final steps

DRIE equipment purchase Final steps. Mikko Kataja, Ville Liimatainen, Mohammadrez Soleymaniha , Sasha Hoshian. Timeline for DRIE equipment purchase. Ground work. Specifications. Call for tenders. Review offers. Write contract. Receive the device. Everyday use. 1-2 weeks. 2-3 months.

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DRIE equipment purchase Final steps

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  1. DRIE equipmentpurchaseFinalsteps Mikko Kataja, Ville Liimatainen, MohammadrezSoleymaniha, Sasha Hoshian

  2. Timeline for DRIE equipment purchase • Ground work • Specifications • Call for tenders • Review offers • Write contract • Receive the device • Everyday use • 1-2 weeks • 2-3 months • 6-8 weeks • 1 week • 1 weeks • 3 months or more • Years 2013

  3. Key people in the finalsteps • Person in charge of the purchase (PiC) • couldbehead of dept, orone of the professors • Main users • PhDstudentsorPostdocresearchers • Micronovadirector and secretary • Veli-Matti Airaksinen • Head of department

  4. Evaluation of the offers • Evaluation criteria has been decided before the call for tenders • Decision has to be made according to the published criteria or the rejected suppliers can (and probably will) file a complaint • Price is most likely the most important criterion as long as the technical requirements are met • If no supplier is able to meet the requirements, we can contact the suppliers directly to make a direct purchase. • Evaluation of the offers should bedoneby the person(s) in charge and approved by legal department.

  5. Contract • Contact the Head of Procurement at Aalto Finance services (Antti Laakso) • Should already have been in contact during the tendering • Ask for a contract draft for the DRIE purchase • Contact the lawyer at respective school (e.g. Anna Huuskonen for ELEC) • Will check the contract for any legal issues • Contact the person who is authorized to sign the contract • If the contract is the result of a tendering process, the Dean can sign (e.g. Tuija Pulkkinen for ELEC) • If it’s a direct purchase, the Dean can still sign, but further approvals by the President of Aalto University (Tuula Teeri) and the Chief Financial Officer (Marianna Bom) are needed • Contact the company representative for their signature

  6. Receiving the machine Delivery • Where the machine should be delivered? • Micronova building in Aalto preferably at the installation site • Who is in charge from Aalto side to sign the delivery factor? • Secretaryof Micronova or head of the department Sami Franssila Installation • Installation should be done by engineers from the companybut before that the site should be prepared • Piping and gasingsystem ( Micronovaengineerswillberesponsible) • Cleaningup the location • Exhaust • Electrical connections (Veli-Matti orMicronovastaffwillcontact an electrician) • Who should be present at the installation date? • Director, Aalto Nanofab, Veli-Matti Airaksinen • Head of department, Sami Franssila • Main users of the machine (PhDstudentsor engineers from Aalto)

  7. Acceptance tests • Safety • Leaktest(Company engineers, Micronovastaff) • Technical requirements • Etch rate • Aspectratio • Testsamplesareneeded to verify (fabricatedby the main usersthatarealsotrained to use the machine) • For both etch rate and aspect ratio a TEM can be used. • The PiCfindssomeonewhocan prepare the samples and do the TEM measurements. • Calibration • Otherequipment • Pumps, coolingsystem, software • Willbetestedduringtestsamplefabrication

  8. Everydayuse • Instructions and safety signs • Identify right places to put warning banners and instructions location: main user • Who is responsible for making instruction(English, Finnish): main user • Training of new users • New users: Master degree students or Micronova’s staff • Should be performed by Main users( PhD students) • Upkeep • Everyuserhas to cleanupaftertheiruse • Cleaning, changing gas and waste: To be performed by main users • Main users check the equipment according to the manufacturers specifications • Additional maintenance by the manufacturer (PiC) • Booking and logging systems • Booking: LIMS • Micronova staff will add new equipment to LIMS, main users will take care of adding new users • Logging: PESO • Troubleshooting • First step: Main users • Second step: company troubleshooting service( e.g. remote troubleshooting)

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