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— Automatic Optical Alignment for AFM

The Project on Micro Manipulation Contest. — Automatic Optical Alignment for AFM. Adviser: Li-Chen Fu. Team Members: S. K. Hung, C. F. Tsai, Y. P. Shyu, D. J. Tzou. 2003 Sep. 19. Outlines. Introduction A Novel Optical Design for AFM The Profile of This Project. 2/17. 1. Introduction.

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— Automatic Optical Alignment for AFM

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  1. The Project on Micro Manipulation Contest — Automatic Optical Alignment for AFM Adviser: Li-Chen Fu Team Members: S. K. Hung, C. F. Tsai, Y. P. Shyu, D. J. Tzou 2003 Sep. 19

  2. Outlines • Introduction • A Novel Optical Design for AFM • The Profile of This Project 2/17

  3. 1. Introduction Question: Move the Sample or Move the Probe? Typical AFM Block Diagram 3/17

  4. Scanning Sample Type v.s. Scanning Probe Type Scanning Sample Type (move the sample / fix the probe) simple detective optical arrangement limited sample size / mass Scanning Probe Type (move the probe / fix the sample) unlimited sample size / mass detective optical head is too massive (700g) to move tracking laser path is hard to implement (nm scale tracking error) 4/17

  5. Scanning Sample Type v.s. Scanning Probe Type Detective Optical Head 4 DOFs to adjust! → complex mechanism embedded → massive (700g) → limited scanning frequency 5/17

  6. Scanning Sample Type v.s. Scanning Probe Type 6/17

  7. Scanning Sample Type v.s. Scanning Probe Type Question:Move the Sample or Move the Probe? Answer: Move the Sample in Horizontal Directions (x, y) and Move the Probe in the Vertical Direction (z). Reason: 1. Horizontal scanning motion is slow (<10Hz) a massive sample is OK 2. Vertical tracking motion is fast (>1000Hz) a light probe is OK Remark: I propose a novel optical design to cause the detective laser spot to track the probe’s vertical motion. 7/17

  8. 2. A Novel Optical Design for AFM • Detective Laser Spot Tracking (novel) • Traditional Optical Microscope • Combination 8/17

  9. Detective Laser Spot Tracking The two lenses can move relatively KEY: Keep the optical path parallel 9/17

  10. Traditional Optical Microscope Magnitude = f2 / f1 The two lenses can move relatively KEY: Keep the optical path parallel CCD camera 10/17

  11. Novel AFM + Traditional Optical Microscope 11/17

  12. 3. The Profile of This Project Integrating AFM with a traditional optical microscope Automatic tip exchange (2-dof) and optical alignment (4-dof) Combining advantages of both scanning types (scanning sample type and scanning probe type) The Targets of This Projects 12/17

  13. Automation Flow Diagram D/A card 6208 with control software 13/17

  14. base protection piezo z-scanner bimorph magnet lens set steel plate probe Z-Scanner Mechanism with Lens 14/17

  15. Robot Mechanism Coil 15/17

  16. Human Resources S. K. Hung C. F. Tsai Y. P. Shyu D. J. Tzou

  17. Any Comment Is Appreciated! ~ The End ~

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