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Processing and Layout. Identify all Parasitic Capacitors . The Anatomy of an Inverter. Well Definition. Well implant. FIELD IMPLANTS. GATE OXIODE and VT ADJUST. ADD POLYGATE. Junction masking and implant. Contacts, m1, m2 & overglass. The Anatomy of an Inverter.
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DESIGN RULES • Mask # Mask Layer Function • 1 nwell Tub for PMOS Transistor • 2 active Define Transistor D-S-ch. • 3 poly Define Transistor W & L • 4 select Threshold adjust • 5 poly contact Physical to gate by m1 • 6 active contact Physical to S & D by m1 • 7 metal 1 global interconnect • 8 via physical connect of m1 & m2 • 9 pad opening for bond wire • 10 poly2 Caps and interconnect