1 / 6

Silicon Micro-Seismometer Feasibility

Silicon Micro-Seismometer Feasibility. A study by a team at Imperial College, UK, in supported by Kinemetrics Inc. I. Standley (Kinemetrics Inc.) Dr. W.T. Pike T. Semple et Al. (Optical and Semiconductor Devices Group, Department of Electrical and Electronic

nasim-caldwell
Download Presentation

Silicon Micro-Seismometer Feasibility

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Silicon Micro-Seismometer Feasibility A study by a team at Imperial College, UK, in supported by Kinemetrics Inc. I. Standley (Kinemetrics Inc.) Dr. W.T. Pike T. Semple et Al. (Optical and Semiconductor Devices Group, Department of Electrical and Electronic Engineering, Imperial College London, UK)

  2. LATERAL SILICON SUSPENSION We have successfully created lateral resonant structures using DRIE etching in silicon which demonstrate high MTQ products under vacuum levels of <0.00001 Torr. The structures shown have a width of the order of 30μm and a depth of 525 μm. The “die” size is of the order of 2cm x 2cm These structures have been evaluated in an SEM under different pressure ranges and the “Q” measured, by the decay time of the mechanical oscillations.

  3. Structures Vibrating in an SEM

  4. Q Derived from SEM Measurements

  5. MTQ of Silicon SeismometerStructureunder vacuum10Hz, 0.25g, & Q=40,000MTQ=1kg.sP<0.001 Torr

  6. Future Work • Produce a silicon structure with integrated electro-magnetic actuator coil and displacement transducer at atmospheric pressure. Performance target is <1nano-g level from 100 seconds to 10Hz. • Evaluate possibility of a vacuum sealed device.

More Related