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eLearning for Young Experimenters: Semiconductor Materials and Devices

Explore eLearning as a tool to support young experimenters in understanding semiconductor materials and devices through interactive courses and multimedia elements, enhancing their skills and knowledge in electrical characterization techniques.

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eLearning for Young Experimenters: Semiconductor Materials and Devices

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  1. Department of Microelectronics Faculty of Electrical Engineering and Information Technology Slovak University of Technology in Bratislava eLearning as a support in education of young experimenters Šebok J., Stuchlíková Ľ., Nemec M., Benkovská J., HarmathaL., Donoval D. mail to: lubica.stuchlikova@stuba.sk European Workshop on Microelectronics Education, 10.-12.5.2010, Darmstadt

  2. Motivation C-V measurement I-V measurement DLTS ………. ………. time pressure for studying very good skills are needed not enough information about measuring

  3. Motivation New skills for young experimenters ALternative source of information Flexible study time Remain in one location Support for individual projects Elements of multimedia Time pressure for studying

  4. eLearning ………. ………. electronic learning: • www on-line courses; • interactive animations; • Flash® presentations; • discussion forum; web interactive course: • more effective studying; • more attractive studying; • educational materials’ database;

  5. Interactive course „Semiconductor materialsand devices electrical characterization“ accessible on the educational portal http://ec.elf.stuba.sk

  6. Software The current version of eLearn central uses a course management system: Modular Object - Oriented Dynamic Learning Environment (a software package for Internet-based courses and web-sites’ producing) All lessons are converted into the SCORM packages. Sharable Content Object Reference Model - 2004 THESIS Professionalis a suite of eLearning tools utilizing SCORM standards and integrated with Microsoft Office

  7. Interactive course “Semiconductor materials and devices electrical characterization” deals with electrical measurement techniques in Semitest laboratories.

  8. Course Design • The main part: • News forum • The aim of course • How to study in this course • Course authors • Interactive site map • seven topics with educationalmaterials Three basic parts On the left side: People/Participants ; Activities/Forums ; Search, Course categories, Resources ; SCORMs; Random term in glossary. On the right side: Latest news, Virtual tour in SemiTest laboratory, Upcoming News and Recentactivity.

  9. Coursestructure Structure of the course is made analogic to diagnostic measuring methods exploited in SemiTest Laboratories on the Dpt. of Microelectronics Diagnostic methods The second level defines barrier structures which are measurable by diagnostic methods Barrier structures The third level is concerning with single measurements applied on ideal and real structures Single structure behaviours The course “Semiconductor materials and devices electricalcharacterization” includes: seven Scorm lessons, sixteen interactive flash animations, hypertext references

  10. Aims’ definition Each lesson is introduced with a definition of study objectives. • short well defined units enriched by: • content-relatedschemes • illustration • photos and images The aim

  11. Controlling Navigation • active navigation menu bar • numerous navigation elements • further navigation

  12. Current-Voltage (I-V) measuring • I-V measuring background information • Hardware (HW) station configuration • Keithley 238 (High current source) • Keithley 487 (High voltage source) • Keithley 617 (Programmable electrometer) • Measuring system introduction • Four-Probe measuring method • Software (SW) station configuration • basic software requirements • basic modules’ description • DCATS – data flow structure

  13. Capacitance -Voltage (C-V) measuring • C-V measuring background information • Hardware (HW) station configuration • HP 4280 1MHz C meter / C-V plotter • Agilent 4248A precision LC meter • output data are stored with software utils • Software (SW) station configuration • HERMES (Schottky contact measure sw) • IRIS (MOS structures measuring utility)

  14. DLTS measurements • DLTS measuring background information • Hardware (HW) station configuration • Polaron DL4600 • Biorad DL8000 • Software (SW) station configuration

  15. DLTS measurements

  16. Schottky structure theory • Historical review; • Schottky contact • Band diagram; • Forward and reverse bias applying; • Current transfer mechanism; • Thermodynamic equilibrium; • Contact potential; • Theory of thermal emission;

  17. Schottky structure theory • I-V characteristics of Schottky contact; • saturation current; • potential barrier height; • idealization factor; • serial resistance; • Practice: • measured structure description; • values and evaluations;

  18. Interactive animation Animation of work in measurement software HERMES

  19. Interactive animation Animation of inner processes in structures

  20. Summary SemiTest laboratories are being built up for more than twenty years by researchers and teachers from our department in a close cooperation with students and post gradual students participated inthe research activities of the SemiTest Laboratories We used their experiences and developed new interactive course for our young experimenters „Semiconductor materialsand devices electrical characterization“

  21. Conclusion • This course is being developed by members of the eLearn Central Team. • It is a result of cooperation of teachers an students participating at individual and team projects. • Nowadays the course is in a process of updating of the educational materials. • The modular structure of the course allows course innovating constantly according to users’ demands. • - is being developed online help for measuring DLTS method... • - is being developed database of research papers GaN materials

  22. Conclusion This course is accessible on the portal “eLearn central” for students on the link http://ec.elf.stuba.sk/moodle/course/view.php?id=128with access rights only. The aim of this course is to prepare the complex educational study material for students participating in the SemiTest Labs’ research activities. The future will show, whether we can help bachelor students in their work in SemiTest Laboratories in this way or not.

  23. Thank you, for your attention ! This work was partially supported by projects: CENAMOST (VVCE-0049-07) & VEGA 1/0507/09 & KEGA 3/7248/09 mail to: lubica.stuchlikova@stuba.sk

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