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Micro-mirror

Micro-mirror. Micromechatronics System FH AACHEN UNIVERSITY OF APPLIED SCIENCES. Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras Ramanathan Swaminathan Spandan Shroff. 14 -11-2011. Project Goal. Design of an electrically controllable micromirror

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Micro-mirror

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  1. Micro-mirror Micromechatronics System FH AACHEN UNIVERSITY OF APPLIED SCIENCES Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras RamanathanSwaminathan SpandanShroff 14-11-2011

  2. Project Goal Design of an electrically controllable micromirror Implement the design to specific application Rotational motion Linear motion (Optional) Micro scanning mirror Rotational+ Translational Micro scanning mirror Source: FhG-IPSM

  3. Tasks Study on Application of Micromirror Type of Micromirror Working principle of Micromirror Spectrometer Working principle Advantage of disadvantage compared to conventional solution Design on Spectrometer system Micromirror specification Micromirror system Sensors andActuators

  4. Application Advantage of micromirror implementation over conventional solutions • Small size • Low cost, • Fast response – filter unwanted wavelengths • High signal to noise ratio • Reduced complexity and low power consumption Source: FhG-IPSM Sensors andActuators

  5. application Confocal microscopy Application 3D biological imaging Advantages : Applicable to surface profilometry Scanning unit (Micromirror) moves the focused laser beam across specimen line by line Source: Carl Zeiss, Nikon Sensors andActuators

  6. application 3D Photonic switch Application Fibre optical communication Advantages : Low cost, more simple optical path (more than 32x32 array) Micromirror Static type with high pointing precision Source: GLIMMERGLASS

  7. application Spectrometer Application IR - Organic chemistry UV, Visible light - Concentration of solution quantitatively Advantages : Small size, High Speed Micromirror resonant type Source: Carl Zeiss, Acal BFi Germany GmbH Sensors andActuators

  8. Working Principle Monochromator In-plane diffraction grating Micromirror Principle Prism Diode Array Source: FhG-IZM

  9. Diffraction grating Monochromatic light d sina + d sinb= wavelength x m So leading to constructive interference

  10. Patent study Triple Grating Monochromator for ~121nm to IR Czerny-Turner mount Turret system: Triple Grating in triangular arrangement Source: Acton Research

  11. Portable Monochromator

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