SYSTEMS ON SILICON MANUFACTURING CO. PTE LTD

1. A quick glance…….. • 8 inch wafer foundry • Producing deep sub-micron processes for complex logic chips & Systems-on-chip • Joint venture between NXP Semiconductor & TSMC RIE Safety Cabinet 29 July 2008 By Improvement Area :Failure Analysis Laboratory Reactive Ion Etcher (RIE) SYSTEMS ON SILICON MANUFACTURING CO. PTE LTD Red Cross “TOWARDS SAFETY EXCELLENCE”

2. “HIRA” for risk assessment “JSA/PSO” to identify hazards D1 : Define Team D2 : Describe Problem D3 : Implement Containment Action D4 : Define and Verify Root Causes D5 : Choose and Verify Permanent Corrective Action D6 : Implement Corrective Action “Brainstorming” & “SCAMPER” technique Idea generation D7 : Prevent Recurrence “Fishbone Diagram” root cause analysis D8 : Congratulate Team (Benefits) Analysis Techniques • Techniques to be used : • 8D (Problem solving) • HIRA (Risk assessment) • Fishbone (Root cause analysis) • Brainstorming & SCAMPER technique (Generate ideas) • JSA/PSO (Hazard identification)

3. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D1 : Define Team D2 : Describe the Problem

4. D1 : Define Team • Facilitator • Tan Seng Hin (FA Manager) • Leader • Oh Siew Khim (FA Assistant Engineer) • Member • Teresa Jee Meng Goak (FA Technician) • Lee Sui Lan (FA Technician) • CK Wong (Vendor)

5. D2 : Describe The Problem • Annual review of FA lab activities • Through JSA & PSO • Identify new potential hazards • New potential hazards identified on one activity • “Clearance of condensed corrosive oil on RIE machine” • Identified during PSO • Hazard identification & risk assessment (HIRA) found the risk to be high

6. Oil mist from RIE machine pump Up to acid exhaust Corrosive oil mist (ph2 level) condensed from exhaust every few weeks Transparent pipe to check accumulation of oil valve Oil accumulated Extension pipe Valve to discharge oil Installed a valve and extension pipe for clearing accumulated oil D2 : Describe The Problem Connected to acid exhaust • Background Reactive Ion Etch (RIE) machine

7. Job Safety Analysis (JSA) D2 : Describe The Problem • Procedure to clear accumulated corrosive oil • Place chemical bag over pipe • Open valve to discharge oil • Wait for oil to fully discharge and stop dripping • Close valve & clean pipe • Background

8. 3 potential hazards identified D2 : Describe The Problem Peer Safety Observation (PSO)

9. Prolong bending during clearance resulting in backache (ergonomic) Oil drip on floor if chemical bag torn by sharp object resulting in slip & fall D2 : Describe The Problem

10. Improper closure or faulty valve resulting in corrosive oil substance dripping on floor (environmental pollution) Power cable Corrosive oil substance contact with live wires resulting in electrocution Slip & fall hazard resulting in physical injury D2 : Describe The Problem

11. Need immediate attention !! D2 : Describe The Problem Hazard Identification and Risk Assessment

12. D2 : Describe The Problem • Team Goals • Reduce the risk ofelectrocutionfromcriticalto low. • Reduce the risk ofslip & fallfrom mediumtolow. • Reduce the risk ofbackachefromhightolow. • Timeline : 12 June 2008

13. D2 : Describe The Problem

14. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D3: Implement and Verify Containment Action

15. D3 : Containment Action • Cover pipe opening with chemical bag to contain unforeseen corrosive oil leak • Slip & Fall • Contact with live wires • Procedure to check chemical bag before use & use double bags • Awareness briefing • Straighten back when performing task (ergonomic) • Personnel with backache problem not allowed to perform task

16. Containment actions D3 : Containment Action Hazard Identification and Risk Assessment

17. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D4: Define and Verify the Root Causes

18. Method Material Environment Machine/ tool Man D4 : Verify Root Causes Method Material Wrong material Potential hazards on condensed oil mist clearance activity Procedure not updated Environment Wrong PPE No safety communication PPE, pipe, bag Incorrect safe work procedure Dim lighting Unreliable Inferior quality No safe work procedure Space constraint PPE, pipe, bag clearance bag Confuse safe work procedure Procedure too manual No PPE Did not follow safe work procedure No warning signs Do not know safe work procedure Reliability Low working height Did not use PPE Parts wear-out Did not attend safety training Capability (old injury, physical built) Machine/ tool Man

19. D4 : Verify Root Causes

20. Design engineering control solution Review material used in new solution D4 : Verify Root Causes • Depend much on administrative control • Personnel constant monitoring of procedure • Constantly holding on to chemical bag during clearance • Ergonomic (Low working height) • Constant exposure to corrosive oil • Constantly ensuring oil do not drip or leak onto floor during clearance • Need to ensure valve is properly closed • Need to monitor functionality of valve • Unreliable material used • Chemical bag possibly torn by sharp object

21. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D5: Choose and Verify Corrective Action

22. Brainstorm sessions Engineering solution criteria : • Protection against electrocution • Protection against slip & fall • Protection against contact with corrosive oil • Solve ergonomic issue • No other hazard introduced • Ease of use • Ease of maintenance

23. Idea 1 Idea 2 Facility pipe Facility pipe Clamp funnel Waste container fit direct to pipe Waste bottle D5: Choose and Verify Corrective Action . Total 4 ideas generated

24. D5: Choose and Verify Corrective Action . Idea 3 Facility pipe Facility pipe Waste bottle direct to pipe Remove waste bottle Sitting block Total 4 ideas generated

25. D5: Choose and Verify Corrective Action Idea 4 Safety cabinet Door Collection Tray Total 4 ideas generated

26. Adapt good ideas Combine good ideas Generated 1 GREAT idea!! Put good idea to other use D5: Choose and Verify Corrective Action SCAMPER TECHNIQUE Substitute Combine Adapt Modify/Minify Putto other use Eliminate Rearrange

27. Movable pipe fit into facility pipe and to waste bottle Waste bottle Flooring D5: Choose and Verify Corrective Action Idea 2 Idea 1 Fit into facility pipe. Movable funnel Waste bottle Combining idea 1 and 2 : Movable pipe that fit into facility pipe and ability to slide in and out of waste bottle. • Corrosive oil flow direct into waste bottle • Personnel has no direct exposure to oil • Any leak is contained within the piping into the bottle.

28. At the same time, cover over facility pipe • Adapt idea 4 safety cabinet design : • Concealed on all sides for double protection • Contain any unforeseen spill within cabinet. Movable pipe insert through hole with shoulder resting on surface of cabinet to prevent sliding down Flooring D5: Choose and Verify Corrective Action Idea 4 Prevent direct contact with corrosive oil Safety cabinet design

29. Put to other use idea 4 collection tray concept into containment tray • Contain oil leak or spill e.g. if bottle is crack Containment tray Flooring D5: Choose and Verify Corrective Action Idea 4 Collection tray

30. RIE Safety Cabinet Facility pipe Movable pipe design with shoulder Safety cabinet Door Waste bottle Containment tray Flooring

31. D5: Choose and Verify Corrective Action How it works : Corrosive oil substance accumulation Flooring

32. D5: Choose and Verify Corrective Action How it works : Open valve Oil flows through facility pipe direct down to waste bottle via movable pipe. Waste bottle Flooring

33. D5: Choose and Verify Corrective Action How it works : Close valve Flooring

34. D5: Choose and Verify Corrective Action How it works : Slide movable pipe up to disconnect from waste bottle Flooring

35. D5: Choose and Verify Corrective Action How it works : Open door Flooring

36. D5: Choose and Verify Corrective Action How it works : Remove waste bottle, cap it and dispose as Toxic Industrial Waste Flooring

37. D5: Choose and Verify Corrective Action How it works : Replace new bottle Flooring

38. D5: Choose and Verify Corrective Action How it works : Slide movable pipe down to connect to new waste bottle Flooring

39. D5: Choose and Verify Corrective Action • Advantages : • Ease of use • Ease of removing waste bottle • User do not need to constantly perform and monitor task • Engineering control • Oil leak due to improper valve closure or faulty valve is contained within cabinet and waste bottle. • Protect personnel (double protection besides PPE) • Overcome ergonomic problem • Easy to clean (detachable parts) • No new hazard introduced RIE Safety Cabinet Flooring RIE safety cabinet

40. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D6: Implement Permanent Corrective Action

41. Facility pipe Movable pipe Safety cabinet Door Waste bottle Containment tray User in operation during discharging oil (Engineering Control) RIE Safety Cabinet installed to piping D6: Permanent Corrective Action

42. Slide down movable pipe into waste bottle Slide up movable pipe Replace new waste bottle and slide pipe into bottle Remove waste bottle D6: Permanent Corrective Action After discharging, slide up pipe

43. Before Administrative control Before Potential oil leak causing hazards After After Cabinet provide round the clock protection to contain potential leak Engineering control implemented D6: Permanent Corrective Action Before & After Improvement

44. Protective cable cover for double protection against potential contact with corrosive oil D6: Permanent Corrective Action Before & After Improvement

45. D6: Permanent Corrective Action JSA No further hazard PSO

46. Effective measures reduced risks further Containment actions D6: Permanent Corrective Action Hazard Identification and Risk Assessment

47. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D7: Preventive Actions

48. HIRA and safe work procedure updated and communicated (502-225-0001) • Yearly review of documents Education & Awareness Standardization • Train current staff on use of RIE Safety Cabinet • Train new staff in OJT program Monitoring • Weekly check on condition of RIE Safety Cabinet, piping, valve and joints D7: Preventive Actions Prevention is better than cure

49. seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D8: Benefits & Future Improvement

50. Contribute to 0 EHS incident • Engineering control over administrative control • Risk of electrocution reduced from critical to low • Risk of slip and fall reduced from medium to slight • Risk of sustaining backache eliminated • Innovative solution • Simple & creative customized solution (not available commercially) • Recognized as Best Known Method in SSMC innovation circle • Easily replicated for solving problems similar in nature • Environment & cost effectiveness • Cabinet fabricate in-house from waste material • Waste bottle recycle from disposed chemical container • Eliminate use of chemical bags which are disposed after used TANGIBLE BENEFITS