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Production and Regional Center (Russia)

Production and Regional Center (Russia). Production Center RIMST/ELMA , Zelenograd, Moscow region Regional Center JINR, Dubna, Moscow region Production Center - Regional Center distance: 100 km. Production Center (Russia).

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Production and Regional Center (Russia)

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  1. Production and Regional Center (Russia) Production Center RIMST/ELMA, Zelenograd, Moscow region Regional Center JINR, Dubna, Moscow region Production Center - Regional Center distance: 100 km N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  2. Production Center (Russia) RIMST/ELMA - Research Institute of Material Science Technology/ELectronics MAterials - status of the (pre)production - technology, yield - results of the (pre)production - plans, capacity N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  3. Status of (pre)production in Russia • 1999: manufactured 250 sensors on Topsil wafers: 300m; <111> and <100>; double sided polished (DSP) and single sided polished (SSP); - inter strip distance=60m, without passivation. • 2000: manufactured 165 sensors on Wacker wafers corresponding to final specifications with passivation PSG-phosphor silicon glass. • 2001: planned 255 sensors (40 sensors for Greece) corresponding to final specifications. Today (27 June’01) - 74 good sensors ready (57 delivered in JINR and measured). 175 wafers in the production line. N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  4. p+ side: - implantation: ions of B+ - energy: 35 keV - dose: 120 C/cm2 n+ side: - implantation: ions of P+ - energy: 100 keV - dose: 800 C/cm2 - diffusion annealing: 3h/1100C passivation: - p+ side covered by 1 m of PSG (phosphor silicon glass) cutting: - through wafer (by diamond saw) Yieldfor sensors ’00 with final specification (statistic=165 detectors) on Wacker wafers is equal to 60%. Main losses: - technology process: 31% - mechanically broken during processing: 4% - bad parameters after cutting : 4% - bad parameters from probing at RIMST/ELMA: 1% Technology and yield of sensors N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  5. Main results of the R&D in Russia • Increase of the value of break down voltage of series detectors: - 1999 about 10% detectors rejected with Ubd<300V); - 2000 detectors with Ubd >300V. N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  6. Thickness and capacitance of sensors • Batch of wafer 300m - correlation between electrical measurements of Cb and thickness measured mechanically Cb=0·Si·A/d, where: 0=8.8510-14F/cm Si=11.9 A- area of detector, cm2 d - thickness of detector, cm Cb(1cm2/300m)=35pF Cb(40cm2/300m)=1400pF N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  7. Width measurement of the Si Sensors N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  8. Cutting of sensors N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  9. Accuracy of sensors cutting - accuracy of strip alignment on aluminum tile depends on accuracy of cutting - edge of sensor along strip#1 is a reference line while aligning on tile N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  10. Plan for manufacturing of silicon sensors in Russia Years: # of sensors: 1999(R&D) 200 (spare) 2000 150 2001 215 2002 215 2003 580 2004 540 Total numbers of sensors: 1900 = 1700 + 200(spare) - compatible with overall planning - follow financial profile of Russia MAX capacity of RIMST/ELMA: -1500 wafers per year - 900 good sensors/year Production plan and capacity of RIMST/ELMA Conclusions: - RIMST/ELMA ready to manufacture Si-sensors with parameters corresponding to the final Preshower specifications N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  11. Regional Center (Russia) JINR - Joint Institute of Nuclear Research - silicon sensors test and database - the micro-module assembly - manpower - irradiation center in JINR (120 km from Moscow) N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  12. SE Silicon Sensors Quality Test • A 32-probe station in JINR, (Dubna + Minsk), for silicon sensors quality test is available for sensors mass production • quality test productivity - 150 sensors per month • Results are stored locally in Dubna and are sent directly to CERN CRISTAL Data Base http • Silicon sensors are labeled with bar-codes and stored in Dubna for further micro-modules and ladders assembling N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  13. Production and quality control of sensors Input control in JINR (two steps): 1. Fast input control of all detectors upon reception from Zelenograd: visual inspection and total I-V up to 500V on mini 32-probe station (need about 30min/det.) and fast communication with producer. All detectors put in plastic envelopes with bar code numbers. 2. Full quality control of detectors for CRISTAL Data Base N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  14. 3 Si sensor 3 63 63 Input Control Workflow Sensor and ceramic support thickness measurement • Sensor thickness measurement in clean room (average from measurements in 9 points) - 6 min • Sensor upload to the probe station, probes alignment, verification of contacts - 2 min • CV-measurement - 21 min (up to 150V, step 10V) • IV measurement - 20 min (up to 500V, step 25V) • DS-file + CV, IV and DS files sending to local DataBase - 10 min • IV, CV and DS files sending to CERN CRISTAL DataBase + its workflow performance - ??? min (not investigated yet, depends on the Network productivity) Measurement: about 1 hour per sensor, or 7-8 sensors a day Database entry: 7-8 sensors per 1/2 day Available manpower: 2 people N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  15. Test Set-up Operator Interface IV Measurement CV Measurement N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  16. PC1 PC2 TCP/IP address TCP/IP address Test Set-up for Input Control Database location Data-Base User Interface JINR Computer Net A F N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  17. Data-Base User Interface Local database is available for storage of the measurement data and their transfer to CERN CRISTAL DataBase N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  18. Micro-module assembly Photo of SE-plane R&D: - design and manufacturing of tooling prototypes for the assembly; - 18 micro-modules assembled for SE-Prototype by optical alignment for beam tests at CERN; - 20 micro-modules assembled for temperature and mechanical tests by two method - optical and mechanical alignment; - accuracy measured for 16 modules assembled by two method (optical control); Photo of ladder N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  19. Space condition for assembly of micro-modules in JINR Clean room: class:100; area:50 m2; temperature:+22C; humidity:30  60% ; technological media:vacuum, nitrogen, H2O (=18 MOhmcm). N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  20. IBR-2(Pulsed Neutron Reactor): - working frequency: 5Hz; - half-width of pulse: 220s; - peak power in the pulse: 1500 MW; - 14 horizontal channels; - max neutron flux:1012 ncm-2s-1; - max dose rates: 10 Gys-1; - ratio n0/ varied by beam filters and absorbers. /1/. A.Cheplakov et al., Radiation hardness of GaAs preamplifiers for liquid argon calorimetry at LHC, MPI Report, PhE/96-15. Irradiation center in JINR/1/ N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  21. Irradiation conditions: (channel #3, IBR-2, JINR) - typical flux : 109 ncm-2s-1 - geometrical acceptance: 2040 cm2 - temperature of irradiation: +20C - monitoring of the neutron fluence: ± 10% - average kinetic energy of neutrons: 1.5 MeV - storage of sensors after irradiation: at -5C - test of irradiated detectors at (-9 C  -30 C): * I-V and C-V on mini-32 probe station * noise (in future with CERN set-up) N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  22. Araldite rapide Ag-glue Freeze chamber (-10°C) Al-plate Det.1 Imeas.=Id1+Id2 HV GND Det.2 +500V HV=500V Glue Capton strips Long time stability tests of two detectors after 21014 ncm-2 Last version of gluing Si-detector on PCB N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  23. Manpower in JINR regional center Dubna Silicon Group include 8 peoples at the present moment: 1. T.Balalykina -engineer 2. A.Cheremukhin- scientist 3. A.Dmitriev -scientist 4. V.Elsha - engineer 5. N.Lustov - engineer 6. A.Urkinbaev - scientist 7. N.Zamiatin - scientist 8. E.Zubarev - engineer/designer N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

  24. Conclusions: For assembly of micro-modules in JINR: Ready: - silicon sensors quality control - technology of assembling - tooling for assembly - equipment for optical control - manpower Not ready: - set up for measurements of noise sensor + electronics hybrid(will be provided by CERN) N.Zamiatin (JINR, Dubna), SE PPR, 5-6 July, CERN

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