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The Anti-Gravity MicroMachine

The Anti-Gravity MicroMachine. Presented by: Vertically Challenged. Introduction. Vertically Challenged is… Shabnam Abedi Moghaddam Michele La Haye Richard Tu Terrence Yu. What are Micromirrors?.

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The Anti-Gravity MicroMachine

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  1. The Anti-Gravity MicroMachine Presented by: Vertically Challenged

  2. Introduction • Vertically Challenged is… • Shabnam Abedi Moghaddam • Michele La Haye • Richard Tu • Terrence Yu

  3. What are Micromirrors? • Change the angle of a reflected beam in multiplexing and de-multiplexing of optical signals • Very precise and flawless • Aim: raise the mirror to the desired angle

  4. Mirror Animation Click in window to start animation

  5. Lever Applied Force Fixed Hinge Mirror Wafer The Problem • Vertical lift cannot be obtained through horizontal movement • Fabrication process leads the mirror to sag down

  6. Fixed Hinge Mirror Lever Applied Force Wafer The Solution • Provide initial lift to the mirror

  7. Thermal Actuators • Make use of differing arm thickness to provide movement • Problem: using the principles described, it is difficult to obtain vertical movement

  8. Poly 0 Poly 1 Poly 2 2 20 Vertical Thermal Actuators • Design 1: Built to provide a downward motion but is overdriven; when current is removed the actuator snaps up

  9. Poly 0 Poly 1 Poly 2 2 20 More Vertical Thermal Actuators • Design 2: Provides upward motion through the use of thin flexible connectors

  10. Poly 0 Poly 1 Poly 2 2 20 Even More Vertical Thermal Actuators • Design 3: U-shaped designed to prevent thicker arm from conforming

  11. Thermal Actuator Animation Click in window to start animation

  12. Poly 0 Poly 1 Mirror Hinge Lever Thermal Actuator Poly 2 Poly0 Levers • Design 4: Downward Vertical Thermal Actuator is used to create lift by pressing down on one end of a lever

  13. Poly 0 MirrorHinge Lever Thermal Actuator Poly 1 Poly 2 Poly0 More Levers • Design 5: Flexible connector used to transfer downward force of Vertical Thermal Actuator to a lever

  14. Lever Animation Click in window to start animation

  15. Linear Stepper Motor • Makes use of 2 banks of horizontal thermal actuators to provide a drive mechanism

  16. Rotating Bar Staple Poly 0 Poly 1 Poly 2 Staple Hinge Staple Hinge

  17. Rotating bar Applied Force Poly 0 Poly 1 Poly 2 Rotating bar Staple Hinge Issues

  18. Poly 0 Poly 1 Poly 2 Torsion Hinge • Thin flexible rods attached to mirror on either side Torsion Hinge Rotating Bar Applied Force Mirror Lever Prevent Bar from Bowing Out

  19. Final Picture

  20. Possible Issues • Torsion hinge might break or not be flexible enough • Actuating arms might bend • Vertical thermal actuators might not give enough deflection

  21. Conclusion • Testing has yet to be done • “We are confident of positive results…” Terrence

  22. Thanks To • Dr. Ash Parameswaran • Rob Johnstone • Shivalik Bakshi • Coffee

  23. ?

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