Achieving Energy Savings at Fabs by Leveraging SEMI Standards to Implement a Pump Idle State

1. Achieving Energy Savings at Fabs by Leveraging SEMI Standards to Implement a Pump 'Idle' State

2. Outline Introduction Motivation for Pursuing Energy Savings in Pumps Ensuing Standardization Process Task Force E54 Specific Device Model Standard Status Device High Level Structure Specific Device Objects and Attributes Specific Device Object Behavior Description Summary Future Update

3. Motivation: Typical Energy in a Fab

4. Motivation: Pumps in Energy Picture According to ISMI research projects and surveys on tool energy use the typical fab facility uses: In excess of 10,000 kVA in Process Tool load New High Volume Manufacturing Fabs may have 2500 kVA in Vacuum pumps In excess of 8.50M m3/hr of recirculation air and corresponding make-up air. In excess of 5100 Nm3/hr each of compressed air and nitrogen with over 750 kW required for each system. All of these system requirements may require in excess of 250,000,000 kWh per year in electricity.

5. Motivation: Pump Application Energy Process tools use vacuum pumps for load lock, transfer chambers, and process chambers. Pump energy may average as much as 52% of total tool energy. Pump duty configuration in a standard FAB is 70% light and medium duty and 30% harsh duty Current installed base of semiconductor vacuum pumps is in excess of 150,000 world wide for just the top 5 suppliers and consume in excess of 3x109 kWh per year. For this reason, any utility savings in the light and medium duty will result in greatest cost savings.

6. Typical Pump Configuration

7. Pump �Idle� Mode Opportunities

8. How Much Could Be Saved at a Typical Fab? Assuming a 300mm fab with ~540 pumps Utility Costs Assumed (2004 North American example) Power 0.057 $/kWh Water 0.00038 $/l N2 0.000011 $/sl Comparison between a fab utilizing iH/iL and the new iGX/iH mix 70% iGX, 30% iH

9. Utilities Cost � US 300mm Fab Example

10. Active Utility Controls Could Gain Even More� Active Utility Control (AUC) enables a �standby� mode Pump is in a reduced state of operation Speed slows Water and N2 are reduced Simple signal from process tool is required Signal indicates tool is in a �safe� standby mode Pump is not at process capacities but is idling Signal removal brings pump out of standby Pump is ready for service in less than 1 minute

11. Utilities Cost Including AUC US 300mm Fab Example

12. Outline Introduction Motivation for Pursuing Energy Savings in Pumps Ensuing Standardization Process Task Force E54 - Specific Device Model Standard Overview Status Device High Level Structure Specific Device Objects and Attributes Specific Device Object Behavior Description Summary Future Update

13. Standardization: E54 Sensor Bus Standard The E-54 Standard provides a mechanism to model and standardize on device capabilities This standardization is communication-medium independent This standard is thus an ideal environment to standardize on an �Idle� mode �and provide a mechanism to verify that an incoming device has this capability This would be pursued through development of a Vacuum Pumps �Specific Device Model�

14. SEMI E54 Standard:Sensor/Actuator Network Standard

15. Standardization: The SEMI E-54 Solution Components of Standard SAN Network Communications �Standards� (NCSs) Cafe Standard (DeviceNet, LonWorks, Profibus, Seriplex, Modbus/TCP, SafetyBus p...) Common Device Model (CDM) One Model Specific Device Models MFC, Endpoint, ISPM, Vacuum Pump, etc. Object Oriented Approach Attributes, services and behavior for each object NCS�s must support object data communication

16. Standardization: E54 Sensor Bus Standard

17. Standardization: Process Steps Formalize a Vacuum Pump Task Force 10+ members Report to Sensor Bus Sub-committee Focus on existing pump platform requirements from participating Task Force OEMs and End Users Identify supplier pump specific requirements (variables, services, and device behaviors) Review other industry standard groups for current vacuum pump definitions (ODVA, Profibus, etc) Allow flexibility for supplier product differentiation and technology evolution Maintain independence of the Sensor/Actuator Network communication interface Drive task force to Consensus

18. Task Force Leadership Task Force Leaders Thomas Russell, BOC Edwards Mark Curry, Applied Materials Richard Gwizdak, Canton Control Solutions Standard Sponsors Sematech Integrated Measurement Association

19. Status Last face-to-face meeting Oct 2004 Portland Oregon Reduce complexity of definition and implementation Defined �Basic Vacuum Pump Device� SDM Provide for capability to extend SDM Mechanical Roughing Vacuum Pump Turbo Molecular Vacuum Pump Cryogenic Vacuum Pump Ballot 3979 SDM Blue Ballot submitted, February 2005 SDM Yellow Ballot submitted, April 2005 Review SDM Yellow Ballot results, July 2005 (SEMICON West) Resbumit SDM Yellow Ballot 3979A, August 2005 Review SDM Yellow Ballot results, October 2005 (Portland)

20. Common Device Model -Specific Device Object Model High Level Object View - Required from CDM

21. Vacuum Pump -Specific Device Object Model

22. Vacuum Pump Device - SDM Objects Common Device Model SAC Object Defined in Common Device Model and Extended Device Manager Object Defined in Common Device Model and Extended Assembly Object Define input/output and configuration Actuator Object Define common actuation elements

23. SDM Object Modeling Process Extending CDM object definitions Sensor/Actuator/Controller (SAC) and Device Manager (DM) objects Extending sensor, actuator, controller hierarchy to specific pump objects Defining an assembly object for reporting of data

24. Extending CDM Object Definitions:Example: Sensor/Actuator/Controller Object Sensor/Actuator/Controller Object - Common Device Model

25. Extending CDM Object Definitions:Example: Device Manager Object Device Manager Object - Common Device Model

26. Device Manager -Exception Detail Alarm Attribute Definition Device Manager Object - Exception Detail Alarm Bit Assignment

27. Device Manager -Exception Detail Warning Attribute Definition Device Manager Object - Exception Detail Warning Bit Assignment

28. Device Manager - Extended Service Definition Device Manager Object Service - Set Pump Access Mode

29. Device Manager -Extended Service Behavour Definition Device Manager Service - Set Pump Access Mode Transition Matrix

30. Providing a Vacuum Pump Assembly for Data Reporting Assembly VP#1 Object - Common Device Model

31. Extending Hierarchy to Specific Pump Objects:Example Actuator-VP � Vacuum Pump Object Actuator-Vacuum Pump Object - Vacuum Pump Model

32. Actuator-VP Object - Vacuum Pump Service Definition Actuator-Vacuum Pump Object Service - Pump (On, Stop, Idle)

33. Actuator-VP Object - Vacuum Pump Service Definition Actuator-Vacuum Pump Object Service - Pump (On, Off, Idle)

34. Actuator Object -Vacuum Pump Service Definition Actuator-Vacuum Pump Object Service - Pump (On, Stop, Idle) Transition Matrix

35. Actuator Object -Vacuum Pump Service Definition Actuator-Vacuum Pump Object Service - Pump (On, Stop, Idle) Transition Matrix

36. Extending Hierarchy to Specific Pump Objects:Example Sensor-AI-VP � Speed Object Sensor-AI-VP Speed Object - Vacuum Pump Model

37. Outline Introduction Motivation for pursuing energy savings in pumps Ensuing Standardization Process Task Force E54 Specific Device Model Standard Status Device High Level Structure Specific Device Objects and Attributes Specific Device Object Behavior Description Summary Future Updates

38. Summary Benefits and ROI of energy conservation through enabling a pump �idle mode� clear E-54 provides a way to standardize this capability and ensure compliance in providing it and providing access to it The E-54 Vacuum Pump Standard effort is in full swing Users should be able to begin referencing it by the end of the year Reference it regardless of whether or not you are utilizing sensor bus for communications.

39. Future Efforts: Task Force Review Yellow Ballot 3979A Otober 2005, Portland SEMI Standard meetings Extend E54 Standard To Include Roughing Vacuum Pump Tubo Molecular Vacuum Pump Cryogenic Vacuum Pump