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Arsine Detection using Chemcassette Technology

History. In 1998 ACGIH proposed changing the TLV for AsH3 from 50 ppb to 2 ppbIn 2007 ACGIH changed the TLV for AsH3 from 50 ppb to 5 ppbHoneywell Analytics has already developed a higher sensitivity and longer lasting ChemcassetteStudy data supported the ability for HA to meet the proposed low

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Arsine Detection using Chemcassette Technology

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    1. Arsine Detection using Chemcassette® Technology

    2. History In 1998 ACGIH proposed changing the TLV for AsH3 from 50 ppb to 2 ppb In 2007 ACGIH changed the TLV for AsH3 from 50 ppb to 5 ppb Honeywell Analytics has already developed a higher sensitivity and longer lasting Chemcassette® Study data supported the ability for HA to meet the proposed lower TLV level for AsH3

    3. Development The increased sensitivity of the new formulation allowed Honeywell Analytics to achieve better lower detectable limits for all equipment, as shown

    4. Gas Monitors’ Low Detection Limit Improvement

    5. Sensitivity Aging Results Honeywell Analytics also tested for Chemcassette® sensitivity. Would the formula remain consistent over three months?

    6. Gas Generation Methodology Apparatus A: gas source with 2 certified AsH3 gas cylinders Apparatus B: Kin-Tech gas generation with permeation device Concentrations determined by theoretical calculations, and confirmed by 3 standard methods

    7. Validation Methods Honeywell verified standard gas concentrations using 3 independent methods FTIR (64 scans with a 10 m cell) Analytical method (Visible spectrophotometry based on NIOSH method S332) Kin-Tech Standard Gas Generator (Permeation Device Method)

    8. Gas Cylinder Consistency Test

    9. Signal to Noise Ratio To validate instrument response, Honeywell Analytics did extensive “noise level” studies both in the laboratory and in the field A new LDL (lower detection limit) was determined by finding an acceptable signal to noise ratio Ratio was set at >3:1 signal to noise

    10. CM4® Low Concentration AsH3 Signal and Noise

    11. System16 Low Concentration AsH3 Signal and Noise

    12. SPM Low Concentration AsH3 Signal and Noise

    13. Ambient RH vs. Noise Test Normal RH setting in semiconductor fabs is about 40% Extensive studies were done on noise levels at 5% RH, at 40% RH and at 90% RH versus the signal generated by 0.5 ppb AsH3 (one tenth of the proposed TLV level) Maximum noise drift caused by shifting RH from 5 to 40% is 10 cts. This is less than 1/10th the signal generated by 0.5 ppb of AsH3

    14. CM4® Ambient RH Noise vs. 0.5 ppb AsH3 Signal

    15. CM4® Monitor Accuracy Data CM4® Gas Monitor accuracy to low level concentrations was verified against the generated standards Verification results are shown at right

    16. CM4® Low Level Calibration Accuracy Verification I

    17. CM4® Low Level Calibration Accuracy Verification II

    18. CM4® Low Level Calibration Accuracy Verification II

    19. CM4® XP Result Consistency Over Time Before placing an XP CM4® at a Beta site, the CM4® was tested for consistency over time in laboratory condition

    20. Beta Testing Data Beta Customer ran sample lines from the test CM4® to existing monitoring locations at the tool, also in the fab utility area, and to VMBs located in the sub-fab The CM4® was run “in situ” for over three months Data was collected by the Customer and transmitted to Honeywell Analytics

    21. CM4® AsH3 Low Detection Limit Feasibility Field Study

    22. CM4® AsH3 Low Detection Limit Feasibility Field Study

    23. CM4® AsH3 Low Detection Limit Feasibility Field Study

    24. CM4® AsH3 Low Detection Limit Feasibility Field Study

    25. CM4® AsH3 Low Detection Limit Feasibility Field Study

    26. Conclusion Based on Lab work, proof of methodology, and field trials, Chemcassette Technology can successfully monitor for AsH3 at the newly established level of 5 ppb without risk of false positives.

    27. Questions??

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