Nanoelectronics and Nanotechnology

1. Nanoelectronics and Nanotechnology Dr. Clifford Lau President-elect IEEE Nanotechnology Council 703-696-0371 c.lau@ieee.org The presenter is solely responsible for the opinions expressed here.

2. Historical Perspective Scientific research in many disciplines in the early to mid 1990s began to approach nanometer scale, although we didn’t call it nanotechnology at the time. 1980 1990 2000 Microelectronics Physics Chemistry Materials Molecular biology Nanotechnology

3. National Nanotechnology Initiative (NNI) • Afterglow of Sputnik had run its course • Need to re-energize the next generation S&E • Interagency working group began planning in 1996 • Support in OSTP • President Clinton announced NNI in January 2000 • NNI officially began in FY2001

4. NNI Investment Strategy • Fundamental nanoscience and engineering research • - Nano-Bio systems • - Novel materials, processes, and properties • - Nanoscale devices and system architectures • - Theory, modeling, and simulations • Grand challenges • - Chem-bio detection and protection • - Instrumentation and metrology • - Nanoelectronics/photonics/magnetics • - Health care, therapeutics, diagnostics • - Environmental improvement • - Energy conversion and storage • Centers excellence • Research infrastructures • Societal implications and workforce preparation

5. Nanotechnology Definition (NSET, February 2000) Research and technology development at the atomic, molecular or macromolecular levels, in the length scale of approximately 1 - 100 nanometer range, to provide a fundamental understanding of phenomena and materials at the nanoscale and to create and use structures, devices and systems that have novel properties and functions because of their small and/or intermediate size. The novel and differentiating properties and functions are developed at a critical length scale of matter typically under 100 nm. Nanotechnology research and development includes manipulation under control of the nanoscale structures and their integration into larger material components, systems and architectures. Within these larger scale assemblies, the control and construction of their structures and components remains at the nanometer scale. In some particular cases, the critical length scale for novel properties and phenomena may be under 1 nm (e.g., manipulation of atoms at ~0.1 nm) or be larger than 100 nm (e.g., nanoparticle reinforced polymers have the unique feature at ~ 200-300 nm as a function of the local bridges or bonds between the nano particles and the polymer).

6. NNI Participating Agency Programs NSF Nanocience/engineeering, fundamental knowledge, instrumentation, centers DoD Information technology, high performance materials, chem-bio-radiological detections DoC/NIST Measurements and standards, commercialization DoE Energy science, environment, non-proliferation DoJ Diagnostics – crime, contraband detections DoT Smart, light weight materials for transportation EPA Environment, green manufacturing of nanomaterials FDA Food packaging, drug delivery, bio-devices Intel Comm Detection, prevention of technological surprises NASA Lighter, smaller adaptive spacecraft, human status monitors, radiation hardening NIH Therapeutics, diagnostics, biocompatible materials miniaturized tools, cellular and molecular sensing NRC Radiological detections, material reliability USDA Biotech for improved crop yields, food packaging

7. National Nanotechnology Initiative, 2001 • NNI was launched in FY2001, with the goal to double the FY00 baseline of $270M. Since then federal investment in nanotechnology has tripled. FY2000 FY2001 FY2002 FY2003 FY2004 (enacted) (request) (request) NSF $97M $150M $204M $221M $249M DoD $70M $123M $224M $243M $222M DoE $58M $88M $89M $133M $197M NASA $4M $22M $35M $33M $31M NIH/HHS $32M $40M $59M $65M $70M NIST/DoC $8M $33M $77M $69M $62M EPA $5M $6M $6M $5M DHS(TSA) $2M $2M $2M $2M USDA $1M $10M DOJ $1M $1M $1M Total $270M $464M $697.1M $773.7M $849.5M

8. Sweden 297 Germany 1949 Canada 382 Russia 854 England 906 Israel 273 France 1317 USA 5395 Japan 2289 China 2474 Switzerland 372 Italy 631 Korea 760 Taiwan 282 Mexico 166 India 461 Singapore 209 Brazil 285 Australia 236 CY2002 PUBLICATION COUNT (By Keyword Nano*, 2/2003) Total Worldwide- 18538 Science Citation Index of 5300 Journals Global Participation in Nanoscience

9. Nanotechnology User Centers and Networks Center Name Principal Investigator Institution NSF National Nanofabrication Users Network (NNUN) Hu Univ. of California Santa Barbara Tiwari Cornell University Harris Howard University Fonash Pennsylvania State University Plummer Stanford University Computational Nanotechnology Network (NCN) Lundstrom Purdue DOE Integrated NanoSystems Michalske Sandia and Los Alamos National Laboratories Nanostructured Materials Lowndes Oak Ridge National Lab. Molecular Foundry Alivisatos Lawrence Berkeley National Laboratory Functional Nanomaterials Hwang Brookhaven Laboratory Nanoscale Materials Bader Argonne Murday, NRL #140a 2/03

10. Centers with Nanotechnology Focus Name Principal Investigator Institution NSF NSEC (Nanoscale Science and Engineering Center) Nanoscale Systems in Information Technologies Buhrman Cornell University Nanoscience in Biological and Environmental Engineering Smalley Rice University Integrated Nanopatterning and Detection Mirkin Northwestern University Electronic Transport in Molecular Nanostructures Yardley Columbia University Science of Nanoscale Systems and their Device Applications Westervelt Harvard University Directed Assembly of Nanostructures Siegel Rensselaer Polytechnic Institute STC (Science and Technology Center) Nanobiotechnology, Science and Technology Center Baird Cornell University MRSEC (Materials Research Science and Engineering Centers) Nanoscopic Materials Design Groves Univ Virginia Nanostructured Materials Chien Johns Hopkins University Semiconductor Physics in Nanostructures Doezema Univ Oklahoma and Arkansas Nanostructured Materials and Interfaces Eom Univ Wisconsin Madison Quantum and Spin Phenomena in Nanomagnetic Structures Liou Univ Nebraska Lincoln Research on the Structure of Matter Bonnell Univ Pennsylvania DOD Institute for Soldier Nanotechnologies Thomas Mass. Inst. of Technology Center for Nanoscience Innovation for Defense Awschalom UC Santa Barbara Nanoscience Institute Prinz Naval Research Laboratory NASA Institute for Cell Mimetic Space Exploration Ho UCLA Institute for Intelligent Bio-Nanomaterials Junkins Texas A&M & Structures for Aerospace Vehicles Bio-Inspection, Design and Processing of Aksay Princeton Multi-functional Nanocomposites Institute for Nanoelectronics and Computing Datta Purdue RICE NORTHWESTERN Murday, NRL #140b 1/03

11. NRL Nanoscience InstituteFacility and Program Open Fall 2003 • Nanoassembly Nanofilaments: Interactions, Manipulation and Assembly Chemical Assembly of Multifunctional Electronics Directed Self-Assembly of Biologically-Based Nanostructures Template-Directed Molecular Imprinting Chemical Templates for Nanocluster Assembly • Nano-optics Photonic Bandgap Materials Org. and Bio. Conjugated Luminescent Quantum Dots Organic Light Emitting Materials & Devices Nanoscale-Enhanced Processes in a Quantum Dot Structures • Nanochemistry Functionalized Dendrimeric Materials Polymers and Supramolecules for Devices • Nanoelectronics Coherence, Correlation and Control in Nanostructures Neural-Electronic Interfaces • Nanomechanics Nano-Elastic Dynamics • Collaborations Developing with universities, NSWC Indian Head, ARL Adelphi, NAVAIR http://nanoscience.nrl.navy.mil/ Dr. Gary Prinz, NRL Code 1100

12. DoD Perspective • Nanoscience and nanotechnology continue to be one of the top priority research programs within DoD • Nanotechnology will impact practically all areas of interest to DoD • Potential for payoff to DoD is great, and is worth the investment

13. OSD $ 28M DARPA $142M Army $ 29M Navy $ 31M Air Force $ 13M OSD $ 28M DARPA $117M Army $ 30M Navy $ 29M Air Force $ 18M DoD Investment on Nanotechnology FY2000FY2001FY2002FY2003FY2004 DoD $70M $123M $180M $243M $222M Planned Note: FY04 budget is estimate only, with high uncertainty in DARPA investment on nano.

14. DoD Focused Areas in NNI * NANOELECTRONICS/NANOPHOTONICS/NANOMAGNETICS Network Centric Warfare Information Dominance Uninhabited Combat Vehicles Automation/Robotics for Reduced Manning Effective training through virtual reality Digital signal processing and LPI communications * NANOMATERIALS “BY DESIGN” High Performance, Affordable Materials Multifunction, Adaptive (Smart) Materials Nanoengineered Functional Materials Reduced Maintenance costs * BIONANOTECHNOLOGY - WARFIGHTER PROTECTION Chemical/Biological Agent detection/destruction Human Performance/Health Monitor/Prophylaxis

15. DoD Programs in Nanotechnology • Army • Nanostructured polymers, quantum dots for IR sensing, nanoengineered clusters, nano-composites, • Institute for Soldier Nanotechnology (ISN) • Navy • Nanoelectronics, nanowires and carbon nanotubes, nanostructured materials, ultrafine and thermal • barrier nanocoatings, nanobio-materials and processes, nanomagnetics and non-volatile memories, • IR transparent nanomaterials • Air Force • Nanostructure devices, nanomaterials by design, nano-bio interfaces, polymer nanocomposites, • hybrid inorganic/organic nanomaterials, nanosensors for aerospace applications, nano-energetic • particles for explosives and propulsion • DARPA • Bio-molecular microsystems, metamaterials, molecular electronics, spin electronics, quantum • information sciences, nanoscale mechanical arrays • SBIR • Nanotechnologies, quantum devices, bio-chem decontaminations • OSD • Multidisciplinary University Research Initiative (MURI), DEPSCoR, NDSEG

16. FY01-06 DURINT Research Program InvestigatorPrime InstitutionResearch Topic Josef Michl Univ. of Colorado Nanoscale Machines and Motors Mehmet Sarikaya Univ. of Washington Molecular Control of Nanoelectronic and Nanomagnetic Structures Michael Zachariah Univ. of Minnesota Nano-energetic Materials Hong-Liang Cui Stevens Inst. of Tech. Characterization of Nanoscale Elements, Devices, Systems Richard Smalley Rice Univ. Synthesis, Purification, and Functionalization of Carbon Nanotubes Randall Feenstra Carnegie Mellon Univ. Nanoporous Semiconductors – Matrices and Substrates Subra Suresh MIT Deformation, Fatigue, and Fracture of Nanomaterials Horia Metiu UC Santa Barbara Nanostructure for Catalysis Mary C. Boyce MIT Polymeric Nanocomposites Paras Prasad SUNY at Buffalo Polymeric Nanophotonics and Nanoelectronics Terry Orlando MIT Quantum Computing and Quantum Devices James Lukens SUNY, Stony Brook Quantum Computing and Quantum Devices Chad Mirkin Northwestern Univ. Molecular Recognition and Signal Transduction Anupam Madhukar USC Synthesis and Modification of Nanostructure Surfaces George Whitesides Harvard Univ. Magnetic Nanoparticles for Application in Biotechnology

17. Multidisciplinary University Research Initiative (MURI) FYInvestigatorInstitutionResearch Topic 98-03 J. Sturm Princeton Univ. Engineering of Nanostructures and Devices 98-03 A. Epstein MIT Microthermal Engines for Compact Powers 98-03 B. Zinn Georgia Tech Microthermal Engines for Compact Powers 98-03 S. Goodnick Arizona State U. Low-power, High Performance Nanoelectronic Circuits 98-03 James Univ. Minnesota Computational Tools for Design of Nanodevices 99-04 Brueck U. New Mexico Nanolithograph 99-04 Datta Purdue Univ. Spin Semiconductors and Electronics 00-05 Mabuchi Caltech Quantum Computing and Quantum Memory 00-05 Shapiro MIT Quantum Computing and Quantum Memory 01-06 Bruce Dunn UCLA 3-D Nanoarchitectures for Electrochemical Power Source 01-06 Ken Poppelmeier Northwestern 3-D Nanoarchitectures for Electrochemical Power Source 01-06 Shelton Taylor Univ Virginia Multifunctional Nano-engineered Coatings 01-06 Ed Cussler Univ. Minnesota Multifunctional Nano-engineered Coatings 02-07 I. Schuller UC San Diego Integrated Nanosensors 02-07 D. Lambeth CMU Integrated Nanosensors 03-08 Dan van der Weide Wisconsin Nanoprobes for Laboratory Design Instrum. Research 03-08 Lukas Novotny U. Rochester Nanoprobes for Laboratory Design Instrum. Research 03-08 William Doolittle Georgia Tech Next Generation Epitaxy for Laboratory Instru. Design 03-08 Jimmy Xu Brown Univ. Direct Nanoscale Conversion of Biomolecular Signals

18. Nanoimprint Lithography Princeton University, Professor Stephen Chou Imprint mold with 10nm diameter pillars 10nm diameter holes imprinted in PMMA 10nm diameter metal dots fabricated by nano- imprint lithography

19. Cluster Engineered MaterialsChad Mirkin,NWU Colorimetric Detection of Anthrax in Solution • Biological agent detection • PCR-free bioagent recognition • DNA/Nanosphere-based • Anthrax detection in solution • 30 nucleotide region of a 141-mer PCR product (blue dot) • Sensitivity: <10 femtomole • Detect single BP mismatch • Anthrax detection on substrate • Agent binds Au cluster • Ag: 105 amplification • Amount: grey scale • Tested • Dugway PG, 2001 • 32 parallel tests in 1.5 hrs! • Active technology transfer • Nanosphere (spin off company) • Medical & industrial interest Colorimetric Detection of Anthrax on Substrate

20. MOLECULAR MACHINES DURINT Prof. Josef Michl, Univ. of Colorado • RESEARCHERS • U CO • Northwestern U • NIST: MD and CO (no MURI funds) • RESEARCH GOALS • Use computation to guide design • Design and build molecular machine components • Attach the machines to surfaces • Coherently operate the machines • Characterize the nanoscale properties • CHALLENGES: All of the above • ARMY/DOD RELEVANCE • Laser protection • Power generation • Chem/bio agent detection • Molecular memory, electronics and devices • Microfluidics • Control of flow at surfaces Proposed Laser Protection Using Molecular Machines • COLLABORATIONS AND TRANSITIONS • Collaboration with NIST, MD: horizontal rotors prepared with and without “paddle” for NIST Microfluidics Pgm • Collaboration with NIST, CO: molecular rotor prepared for NIST single electron transitor program • Collaborations with industry: IBM will do electron beam lithography and Zyvex is supplying patterned surfaces

21. Nano-Systems Energetics (DURINT)P.I.: Michael Zachariah, U. Minnesota, mrz@me.umn.eduhttp://www.me.umn.edu/~mrz/CNER.htm CNER: Center for Nano-Energetics Research Objective Develop new methods for and understanding of nano-scale energetic materials Synthesis, Characterization, Reactivity Nanoscale Energetic Materials • Research Accomplishments • Developed continuous flow reactor for nanoparticle • production and passivation (copy at ARL-WMRD) • Formulated model for nanoparticle formation and • growth • Designed experiments for characterization of size, • composition and reactivity of nanoparticles • Computed oxidative reactions of energetic materials • (Nitromethane, HMX and FOX-7) on aluminum • surfaces Research Areas Methods for nanoparticle growth and surface passivation. Sol-Gel methods for generation of nanostructures Modeling of particle formation from thermal plasmas. Methods for nanoparticle characterization Thermochemistry of nanoparticles and nanostructures. Nanoparticle oxidation kinetics. Characterize rates of energy release for nanostructures. Measurement of solid-solid exothermic reactions. Computational chemistry/physics of nanostructures.

22. Nanocell Approach to a Molecular Computer J. Tour (PI, Rice U.), D. Allara and P. Weiss (Penn State), P. Franzon (NC State), P. Lincoln (SRI), M. Reed (Yale), J. Seminario (S. Carolina), R. Tsui, H. Goronkin, I. Amlani (Motorola). R0 RD0 R1 RD1 RW0 RW1 W0 W1 A Input A 2.1V -.05V 1 0 60.0 time (s) Output 1 930nA -40nA 0 60.0 time (s) Technology Issues: Nanocell assembly, programming, and packaging Objectives: Construct logic devices using programmable Nanocells • Approach • prove molecular circuit programming through simulation • predict properties of new molecules • synthesize new molecules • self-assemble in nanocells • program and package nanocells • April-June 01 Accomplishments: • Half-adder, inverter and NAND simulated • 25 new molecules synthesized • Nanocell wafers (e-beam) designed and in fab • Dry box ready for assembly • Test bed nanocells (optical) in fab • 60 nm Au particle deposition developed • Molecule-based circuits designed • New Molecules proposed for memory Impact & Transition: Molecular Electronics Corp., Motorola

23. Theoretical Analysis, Design, and Simulation of the Nanocell • Calculated electrical characteristics for two new molecules proposed during the kick-off meeting: the dioxo with three rings (1), and the dinitro with four rings (2). • First realistic molecular simulation of a fragment of the nanocell (below). • New candidates for one-year room temperature memory proposed (lower right). R = H, Ac R1, R2 = H, NO2, NH2

24. Objective: Relieve the strain which occurs when films are grown on substrates with mismatched lattice constant. ---------------------------------- Results: GaN films have been grown by MBE on porous SiC substrates with a range of surface pore densities. Strain in the films is characterized by stylus profilometry. Significant strain relaxation is found, with the residual strain being about 3 times smaller than for films grown on nonporous substrates. ---------------------------------- Interpretation: For MBE growth, pores from the SiC continue into the GaN. These pores are “stress concentrators”, acting as nucleation sites for half loop dislocation as seen by TEM. These half loops then propagate and relieve the strain in the film. DURINT - Nanoporous SiC and GaNStrain Relief During Epitaxy of GaN on porous SiCProf. Randall Feenstra, CMU TEM image of MBE-grown GaN on porous SiC Strain in GaN film vs. surface pore density

25. Carbon Nanotube Based Materials and DevicesUniversity of North Carolina at Chapel HillURL: http://www.physics.unc.edu/~zhou/muri Multidisciplinary Approach Objectives • To understand and control the materials chemistry and physics • of nanotubes and nanotube-based materials; • To develop new nano-composites with enhanced mechanical, • thermal and electrical properties; • To fabricate nanotube-based electron field emission devices and • evaluate their properties for technological applications; • To investigate energy-storage capability of carbon nanotubes; • To fabricate nanotube NanoElectroMechanical Systems (NEMS). • Materials synthesis, assembly, functionalization; • Nanometer-scale manipulation and measurements of transport, • electronic and mechanical properties; • Spectroscopic characterization and studies; • Large-scale ab inito and empirical molecular dynamics simulation and theoretical calculations. MURI Team UNC: Physics, Chemistry, Materials Science and Computer Science NCSU: Physics and Materials Science Duke: Chemistry Industrial Partners: Lucent Technologies, Raychem Co. and Ise Electronics DOD Relevance New materials and technology for structural reinforcement, energy storage, electron emission, and nano-device applications. Major Accomplishments Research Highlights • Established materials synthesis and processing capability • First observation of rolling at nanometer scale, including manipulation and simulation of NEMS friction • Measured and simulated the electro-mechanical properties of • carbon nanotubes • Synthesized nanotube-based polymer composites • Fabricated nanotube field emission devices and demonstrated • high current capability (4A/cm2) • Performed the first 13C NMR measurement of the electronic • properties of the carbon nanotubes. • Demonstrated high Li storage capacity in processed SWNTs. Rolling and Friction at the atomic scale Carbon nanotube field emitters provide high current density and stability

26. GOALS/OBJECTIVES • To develop a new multi-functional coating system for military aircraft • Coating will sense corrosion and mechanical damage • Initiate mitigation response to mechanical and chemical damage • Provide corrosion protection and adhesion using environmentally compliant materials Nano-crystalline cladding Sensing Non-chromate inhibition AA2024 substrate • APPROACH • Multi-coat system built upon thermally spayed amorphous Al-alloy cladding • Combinatorial chemistry and nano-encapsulation to identify/deliver non-chromate inhibitors • Colloidal crystalline arrays, and other molecular probes to provide sensing • DOD TECH PAYOFF • Will provide significant advancement in corrosion protection, life cycle costs, and mission safety An Environmentally Compliant, Multi-Functional Coating for Aerospace Using Molecular and Nano-Engineering MethodsUniversity of Virginia, Prof. Shelton Taylor

27. Synthesis, Purification, and Assembly of SWNT Carbon Fibers Prof. Richard Smalley, Rice University Program Goal: Transforming a new type of carbon, single wall nanotubes (SWNTs) into highly organized bulk materials • Activities Underway: • Understand chemistry & kinetics of the HiPCO process for SWNT synthesis • Development of purification methods for SWNT • Mobilization of SWNTs in solutions and/or suspensions • Mechanical and molecular modeling of sidewall chemistry and tube/polymer interactions • Spinning of composites with nanotube fibers DoD Impact: High strength, light weight fibers Structures with controlled dielectric properties Potentials in hydrongen storage and electrode technology

28. Quantum Well IR Sensors Quantum Well Infrared Photodetectors • Advanced Photodetectors • Quantum Well Infrared Photodetectors • Use electronic band engineering and nanofabrication techniques • Multispectral IR imaging • Uncooled Infrared Detectors • Uses nanofabrication and advanced materials • Nanoparticle-Enhanced Detection • Increase light detection by 20X • Target Designation and CCM • IR Lasers for Target Designation • Need: Compact, 300K IR lasers • Solution: Quantum cascade lasers • Impact on Future Army • Smart, multispectral sensors coupled with ATR for target ID • Shorter logistics tail Nanoparticle Enhanced Detection AH-64 Apache Hellfire

29. Al2O3 Al2O3 Al 2.5 nm Nanometric Energetic MaterialsResearch at AFRL Munitions Directorate New approach for energetic materials: nano-thick energetic material coating-layer on nanoscale aluminum fuel particles gives improved, intimate mixing in energetic formulations, and very high specific surface area. These effects support very high burn rates. Al Al 25 nm 29,995nm Energetic Coating 2.5 nm Surface Area = 0.1m2/g Surface Area = 74 m2/g 30 nm Aluminum Particles Each Coated with Energetic Material Layer 30 Micron Particle 30 nm Particle • Scale Differences… • Very High Specific Surface Area • 4- 6 Orders of Magnitude Increase • Short Diffusion Path-Length in Burning • … Can Lead to Important Performance Enhancements • Complete Burning of Fuel Particles • Accelerated Burn Rates • Ideal Detonation in Fueled Explosives • Coating Benefits... • Intimate Contact Between Fuel, Energetic Material • Fewer Problems with Processing, Handling • Material Coating Thickness on Nano-fuel Particles Is Nano-scale • Fewer Defects, Better Crystals • Improved Insensitivity Properties

30. Molecular Scale Control Supramolecular Self-Assembly Nano-Scale Devices Mesoscopic Integration Institute for Soldier NanotechnologiesProf. Ed Thomas, MIT • University Affiliated Research Center • Investment in Soldier Protection • Industry partnership/participation • Accelerate transition of Research Products • Goals • Enhance Objective Force Warrior survivability • Leverage breakthroughs in nanoscience & nanomanufacturing • Investment Areas • Nanofibres for Lighter Materials • Active/reactive Ballistic Protection (solve energy dissipation problem) • Environmental Protection • Directed Energy Protection • Micro-Climate Conditioning • Signature Management • Chem/Bio Detection and Protection • Biomonitoring/Triage • Exoskeleton Components • Forward Counter Mine Accomplishments • Ribbons made of electroactive polymers • Artificial muscle and molecular muscle • Organic/inorganic multilayers for optical • Communications • Tunable optical fibers • Dendrimers for protective armors • Conducting polymer for bio-status monitors

31. Why Nanoelectronics? Stan Williams, HP • The evolution of computer technology over the last few decades has revolutionized computational capability • Faster electronics • Lower power consumption • Larger data handling capabilities • More complex information processing • The era of Nanoelectronics (<100 nm) is forecast (ITRS) to begin within 3 years (2005) Murday, NRL #168 3/02

32. CMOS Scaling Challenges Source: Jim Hutchby, SRC

33. Moore’s Law: Scaling and Microelectronics Optical Lithography Brick Wall Barrier EUV, e-beam, x-Ray Time Source: Bob Trew, NC State

34. Two Paths Evolutionary Microelectronics Nanoelectronics (Including photonics, optics, magnetics, etc.) Revolutionary

35. On the Evolutionary Path • Silicon technology will continue down the scaling path for at least another decade if not two. • In reality, we are already in the regime of nanoelectronics. • New techniques will be invented to overcome some of the limitations of optical lithography, short channel effects, etc. • New device architecture will be invented to continue the down-scaling, e.g. vertical devices. • However, scaling cannot continue forever. • Still a lot of work on circuit and system architectures to exploit the gazillions of devices on a chip. • Then there are multichip modules, flip chip, 3-D, etc. • Silicon technology is not going away for a long time.

36. 9 nm Vertical Field Effect Transistor Drain Source Gate Channel Film N+/P + poly Gate Dielectric L Transistor Gate Electrode N+/P + poly or Silicide Insulating Substrate DARPA HGI Program, PI - K. Saraswat (Stanford U.)

37. Revolutionary Path • Molecular electronics • Spintronics • Single Electron Transistors • Quantum Cellular Automatons • Nanotube transistors • Carbon nanotube switching devices • Quantum nanodots • Nanophotonics • Nanomagnetics • Entangled photon memories • Others

38. Carbon Nanotube Transistors Single nanotube transistor that operates at room temperature. This three-terminal device consists of an individual semiconducting nanotube on two metal nanoelectrodes with the substrate as a gate electrode. The nanotube is ~5 nm in diameter Nanotube Field Effect Transistor IBM Research Fabricated, tested, and functional Delft University of Technology, Professor Cees Dekker

39. Figure 1. Suspended nanotube device architecture. (a) Schematic illustrating a periodic suspended nanotube crossbar array with a device element at each crossing point. The substrate consists of a conductor (e.g., highly doped silicon, dark-grey) that terminates in a thin dielectric layer (e.g., SiO2, light grey). The lower nanotubes (dark grey cylinders) are supported directly on the dielectric film, while the upper nanotubes are suspended by patterned inorganic or organic supports (dark grey blocks). The device elements at each crossing have two stable states: off and on. The off state (b) corresponds to the case where the nanotubes are separated, while the on state (c) is when the tubes are in vdW contact. A device element is switched between off and on states by applying voltage pulses that transiently charge the nanotubes to produce attractive or repulsive forces. After switching, the junction resistance can be read by measuring the current through the junction at a bias voltage much smaller than the voltage necessary for switching. (b) and (c) correspond to the calculated shapes (see text and Fig. 2) of off and on states for a 20 nm (10,10) SWNT, where the initial separation is 2.0 nm. Lieber, Harvard U.

40. On the Revolutionary Path • Revolutionary nanoelectronic devices (chips) are a long way off. • Devices/chips must be stable, reproducible, and low cost in mass production. • Devices/chips must have reliable input/output signals and interconnections. • New circuit and system architectures must be developed to match the nanoelectronic devices. • Devices/chips must be designable, testable, verifiable, and easy to package. • Devices/chips must allow for heat dissipation and removal. • First generation revolutionary nanoelectronics, if and when it is realizable, will be nitch applications, e.g. high density memories. • For random logics, silicon technology will be hard to displace. • Reliability and manufacturability are as important if not more so as speed and performance.

41. INFORMATION NANOTECHNOLOGY AU Nanocluster Vapor Sensor; Snow NRL, MSI/SAWTEK DISPLAY SENSE CNT FED Display; Zhou, UNC TRANSMISSION Superlattice VCSEL; Honeywell GMR Reading Head; IBM STORAGE LOGIC CNT FET; Avouris, IBM

42. Hutchby, SRC

43. Commercial Products • Tools for characterization (FM, SPM, STM, etc.) • Tools for fabrication (NIL, DPL, etc.) • Carbon nanotubes by the pound • 65nm VLSI chips • Corrosion resistant ceramic nanoparticle coatings • Embedded nanotube polymer matrix materials • Sunscreen with TiO2 nanoparticles • Nanoenergetic particles • NEMS devices • Flat panel displays (soon)

44. Summary • Nanotechnology is here to stay • Worldwide investment on nanotechnology • Continues to increase • Basic research is leading to • Commercial products • Frontier for next industrial • revolution