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ALD on MCPs updates LAPD group meeting presentation 10/16/2012

ALD on MCPs updates LAPD group meeting presentation 10/16/2012. Anil Mane and Jeffrey Elam. Recent Sample Delivered. 4x 10cmx10cm MCPs ( with ALO SEE layer) 2x 33mm commercial MCPs (Half and full SEE layer) 1x 8”x8” MCP with flip after ½ deposition Additional:

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ALD on MCPs updates LAPD group meeting presentation 10/16/2012

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  1. ALD on MCPs updatesLAPD group meeting presentation 10/16/2012 Anil Mane and Jeffrey Elam

  2. Recent Sample Delivered 4x 10cmx10cm MCPs ( with ALO SEE layer) 2x 33mm commercial MCPs (Half and full SEE layer) 1x 8”x8” MCP with flip after ½ deposition Additional: Biweekly brainstorming meeting (Weekly/biweekly) Proposal for observer team for ALD work(?) (HEP division)

  3. Learning’s so far with large 8”x8”MCPs • High gain (106), Low background counts, ps resolution, good spatial resolution • High non-uniformity in one direction • Precursor diffusion along the pores • Uneven supply of precursor on substrate and reaction by product • Resistive layer NU vs. SEE layer NU? • ALD on Large MCPs are very challenging : • MCP geometry • Suitable ALD reactor configuration

  4. Our next 3 months plan on MCPs? Required resources: Bare MCPs, Vacuum Oven and Manpower (technician)

  5. Where we are on large area MCPs? • Issue: Non-uniformity • Designed and fabricated new ALD hardware (reaction chamber) • Capable of more uniform precursor flux and effective purging • Compatible with both commercial tool and lab tool • Installation of new HW is in progress • Don’t know how life testing behavior of 8”x8”?

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