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Procurement Readiness Review : Detector Fabrication, Qualification & Assembly at India

Procurement Readiness Review : Detector Fabrication, Qualification & Assembly at India. M D Ghodgaonkar Electronics Division, BARC, India. Present status In April, 2001, twenty detectors have been measured at CERN by BARC scientists. These detectors qualify the CERN specs

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Procurement Readiness Review : Detector Fabrication, Qualification & Assembly at India

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  1. Procurement ReadinessReview: Detector Fabrication, Qualification & Assembly at India M D Ghodgaonkar Electronics Division, BARC, India

  2. Present status In April, 2001, twenty detectors have been measured at CERN by BARC scientists. These detectors qualify the CERN specs for leakage current and breakdown voltage. • Production phase After making the mask for the new geometry, production will be started tentatively by the end of November, 2001. PRR Meeting, July 5-6 2001, CERN

  3. Specification of detector fabricated in India (Batch VI-VIII) • Average leakage current per strip -5-10nA • Average VFD - 60-70V • Total leakage current at VFD - 0.1-0.5A • Total leakage current at VFD+150V - 0.1A - 1A • Breakdown voltage > 500 V PRR Meeting, July 5-6 2001, CERN

  4. PRR Meeting, July 5-6 2001, CERN

  5. PRR Meeting, July 5-6 2001, CERN

  6. PRR Meeting, July 5-6 2001, CERN

  7. PRR Meeting, July 5-6 2001, CERN

  8. Production plan • Mask Design for new geometry • Fabrication of Detectors - • Production center - BEL, Banglore • Characterization/Testing of detectors - • Regional center-BEL, Banglore • Micromodule assembly • Data Base PRR Meeting, July 5-6 2001, CERN

  9. Details of Production Plan • Status of the detector production - The mask for the 6.3x6.3 cm2geometry has been designed. The mask fabrication will be over by the end of August, 2001. - Test run using the modified mask will be completed by the end of October, 2001 - The production run will be started by the end of November, 2001 PRR Meeting, July 5-6 2001, CERN

  10. - The technology for the detector production has been optimized to produce passivated and scribed detectors of the required specs - The yield of the last two batches is about 50% ( after passivation and scribing ) - The production center can produce 1000 detectors or more if required, by October, 2004 - The tentative production schedule will be: 2002 - 250, 2003 - 550, 2004 - 200 - The production schedule will be compatible with the overall micromodule production schedule PRR Meeting, July 5-6 2001, CERN

  11. Tests on wafers at the foundry andsome process related details • Quality of oxide ( oxide charge & interface states), thickness of oxide & passivation ( ellipsometer ), sheet resistance (four probe), junction depth (groove & stain) have been checked on test wafers. • Wafers were measured before/after passivation, before/after scribing to optimize these processes so that there is no degradation of the detector performance PRR Meeting, July 5-6 2001, CERN

  12. The wafers are scribed using a dicing saw (Microautomation 1100, USA). Dicing wheel of 25m width has been used for a through cut of the wafer. • A layer of 0.8 m PSG (phosphosilicate glass) and 0.3 m of undoped glass is used for passivation • The wafers are not numbered at the back-side. After scribing they are out put in particle free envelopes which have wafer and batch number and then stored in sealed boxes. • During production, detectors will be put in mylar envelopes which will have barcodes and will be stored in dry environment. PRR Meeting, July 5-6 2001, CERN

  13. Tests and Measurements Regional center - BEL, Banglore Silicon sensors tests - Tests and measurements will be carried out at BEL in a class 100,000 environment. The temperature and humidity will be controlled as required. - BARC has developed IV and CV measurement systems for automated and simultaneous measurements of 32 strips. PRR Meeting, July 5-6 2001, CERN

  14. Specifications of setups developed at BARC IV & CV setup - Automated simultaneous measurements of all 32 strips - Bias voltage - up to 1000V with resolution of 0.3V - Current range (IV) - 10A with resolution of 0.3 nA - Measurement frequency (CV) - 1kHz, 10kHz & 100kHz - Capacitance range - 500pF with resolution of 0.5pf The measurement setup has been calibrated with respect to the setup at CERN by carrying out measurements on the same detectors at both places. PRR Meeting, July 5-6 2001, CERN

  15. Equipment for measurements ( IV/CV) - Keithley 6517 & 237, HP 4284 is being procured. These instruments will be interfaced using LabView and the software provided by CERN. • Probe heads for making contacts to strips are being made by BARC and also are being purchased from Russia. • The geometric compliance measurements will be carried out using jig provided by CERN ( for width ) and by a comparator ( thickness) PRR Meeting, July 5-6 2001, CERN

  16. Estimation of time for tests and measurements during mass production - Width - 5 min - Thickness - 5 min - Visual inspection - 10 min - IV - 20 min, CV - 20 min - parallel - Noise - 15 min? Total estimated time - about 60 min Manpower - Three-four persons for eight hours per day PRR Meeting, July 5-6 2001, CERN

  17. Micromodule Assembly • Production center - BEL, Banglore - Class 100,000 clean room for assembly - well equipped hybrid facility with manual/automatic Aluminum wire bonders ( Shinkova, Japan ) - It is possible to carry out bonding of the sensors to the hybrid using 1 mil Al wire - Skilled man power is available at BEL for carrying out the assembly. - Alignment/gluing of the detector to the ceramic and then to Al tile can be carried out using alignment tools, substrate and glue supplied by CERN& Dubna - Manpower for assembly ( gluing and aligning ceramic substrate/Al tile ) - from BEL PRR Meeting, July 5-6 2001, CERN

  18. Manpower for detector production, testing & assembly Regional center contact person - Dr S K Kataria Contact person for detector production, testing & assembly - Anita Topkar Detector production - BEL, Banglore Detector qualification tests - BEL, Banglore BARC - Anita Topkar, M Y Dixit, Bharati Agarwal, Vijay Mishra Delhi University- Ashutosh Bhardwaj, Kirti Ranjan, Ajay Shrivastava, Ashish Kumar, Sudeep Chaterjee, Manoj Jha Detector assembly - BEL, Banglore PRR Meeting, July 5-6 2001, CERN

  19. Data Base • The data base designed by CERN will be installed at BEL and BARC • Connectivity at BEL, Banglore will be established for sending the data to BARC • Connectivity between BARC and CERN will be established so that the data can be sent to CERN PRR Meeting, July 5-6 2001, CERN

  20. Irradiation center - BARC Nuclear reactor at BARC - Neutron irradiation can be carried out at different neutron fluence by selecting the location of the sample in the reactor and by operating at different power levels. - Neutron spectrum: Depends on power level. Approx.-fast ( 1MeV or above)-30%, epithermal ( 1-2 eV to 1MeV ) & thermal ( 0.025 eV ) - 70 % Flux - 5E11/cm2/s at 200KW, 1E10/ cm2/s at 4 KW - Time for irradiation up to 2x10E14 - 15-20 min at 200KW power PRR Meeting, July 5-6 2001, CERN

  21. - Irradiation can be carried out without bias and at room temperature - Detectors will be stored in a deep freezer at -50C after irradiation. Total or individual strip current and capacitance will be monitored. One set of equipment will be kept at BARC for these measurements PRR Meeting, July 5-6 2001, CERN

  22. Summary • Production of preshower silicon detectors will be started at BEL by the end of November, 2001. • The test and measurement equipment required for carrying out detector quality check is being procured and is also partly available right now. • By the time production starts, the complete detector characterization facility will be setup at BEL in a class 100,000 clean room. The hybrid facility available at BEL will be used for making modules. PRR Meeting, July 5-6 2001, CERN

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