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Parylene-based pressure sensor for IOP measurement

Parylene-based pressure sensor for IOP measurement. Presenter : Chia-Min Lin (9535811). Research from Caltech Micromachining Laboratory. Outline. Motivation Design concept / Fabrication process Results Summary. Motivation.

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Parylene-based pressure sensor for IOP measurement

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  1. Parylene-based pressure sensor for IOP measurement Presenter : Chia-Min Lin (9535811) Research from Caltech Micromachining Laboratory

  2. Outline • Motivation • Design concept / Fabrication process • Results • Summary

  3. Motivation • Glaucoma is a debilitating disease affecting the optic nerve that results in loss of vision for hundreds of millions of people worldwide. • Raisedintraocular pressureis a significant risk factor for developing glaucoma. Wikipedia

  4. Traditional IOP sensor Contact tonometer Non-contact tonometer Wikipedia

  5. Implantable biodevice P.-J. Chen et al., JMM, 2007.

  6. Bourdon tube theory Wikipedia

  7. Microchannel Bonding Surface Buried M. J. de Boer et al., JMEMS, 2000.

  8. Parylene microchannel Concept and Fabrication results Fabrication results P.-J. Chen et al., μTAS’05.

  9. Cont’d P.-J. Chen et al., Lab Chip, 2006.

  10. Spiral-tube pressure sensor (1G) Apply Bourdon tube theory Fabrication process Unpowered P.-J. Chen et al., IEEE MEMS’05.

  11. Cont’d Fabrication results Testing in water results P.-J. Chen et al., Sensors and Actuators A, 2006.

  12. Implantable pressure sensor (2G) Unpowered Fabrication process Monolithic fabrication and packaging P.-J. Chen et al., MMB’06.

  13. Cont’d Fabrication results Implatable results

  14. Cont’d In vitro (water) P.-J. Chen et al., μTAS’06. P.-J. Chen et al., JMM, 2007.

  15. Cont’d Ex vivo (rabitt) In vivo (rabitt)

  16. Summary • An implantable, unpowered micromechanical parylene-based pressure sensor has been successfully developed as a part of a novel paradigm for intraocular pressure (IOP) sensing. • Monolithic fabrication and packaging of the microdevices have been successfully demonstrated. • The micromachined IOP sensors were characterized in vitro, ex vivo, as well as in vivo.

  17. Thanks for your attention !

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