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Lecture 2 State-of-the art of CMOS Technology. The CMOS Transistor. L. Gate oxide. Polysilicon Gate. W. Source. Drain. Field-Oxide (SiO 2 ). n+. n+. p substrate. Bulk (Body). The NMOS Transistor Cross Section. Self-Aligned Gates NMOS Process.
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Lecture 2 State-of-the art of CMOS Technology
L Gate oxide Polysilicon Gate W Source Drain Field-Oxide (SiO2) n+ n+ p substrate Bulk (Body) The NMOS Transistor Cross Section
Self-Aligned Gates NMOS Process • Create thin oxide in the “active” regions, thick elsewhere • Deposit polysilicon • Etch thin oxide from active region (poly acts as a mask for the diffusion) • Implant dopant
Photo-Lithographic Process optical mask oxidation photoresist photoresist coating removal (ashing) stepper exposure Typical operations in a single photolithographic cycle (from [Fullman]). photoresist development acid etch process spin, rinse, dry step
Patterning - Photolithography SiO2 • Oxidation deposits a thin layer of SiO2 over the complete wafer • Wet Oxidation: water vapor (Furnace 900°C, 15 min, 40 nm) Si + 2H2O SiO2 + 2H2 • Dry oxidation: Pure O2 (Furnace 1000°C, 45 min, 40 nm) Si + O2SiO2 • insulation layer and also forms transistor gates. SiO2
Patterning - Photolithography 2. Photoresist coating: • a light-sensitive polymer is evenly applied while spinning the wafer to a thickness of approximately 1 µm. • -ve Photoresist: Originally soluble in organic solvent, but insoluble after exposure to UV light. • +ve Photoresist: Originally insoluble in organic solvent, but soluble after exposure to UV light. SiO2 PR
Patterning - Photolithography 3. Stepper exposure: • a glass mask , containing the patterns that we want to transfer to the silicon • opaque in the regions that we want to process, transparent in the others (assuming a negative Photoresist) • Where the mask is transparent, the Photoresist becomes insoluble. UV light mask SiO2 PR
Patterning - Photolithography 4. Photoresist development and bake: • the wafers are developed in either an acid or base solution to remove the non-exposed areas of Photoresist. • wafer is “soft-baked” (after PR removal) at a low temperature to harden the remaining Photoresist.
Patterning - Photolithography 5. Acid etching: • material is selectively removed from areas of the wafer that are not covered by Photoresist. • accomplished through the use of many different types of acid, base and caustic solutions as a function of the material that is to be removed.
Patterning - Photolithography • Spin, rinse, and dry: • a special tool (called SRD) cleans the wafer with deionized water and dries it with nitrogen. • smallest particle of dust or dirt can destroy the circuitry. • processing steps are performed in ultra-clean rooms where the number of dust particles per cubic foot of air ranges between 1 and 10. • the wafers must be constantly cleaned to • avoid contamination, and to remove the left-over of the previous process steps.
Patterning - Photolithography 7. Various Process step: the exposed area can now be subjected to a wide range of process steps • Diffusion or Ion implantation • Plasma etching • Metal deposition
Patterning - Photolithography • Photoresist Removal (ashing): • a high-temperature plasma ( mix of chemical materials) is used to selectively remove the remaining Photoresist without damaging device layers.
Example: Patterning of SiO2 Chemical or plasma etch Si-substrate Hardened resist SiO 2 (a) Silicon base material Si-substrate Photoresist SiO 2 (d) After development and etching of resist, chemical or plasma etch of SiO 2 Si-substrate Hardened resist (b) After oxidation and deposition SiO of negative photoresist 2 Si-substrate UV-light Patterned (e) After etching optical mask Exposed resist SiO 2 Si-substrate Si-substrate (f) Final result after removal of resist (c) Stepper exposure
Process steps • Diffusion or Ion implantation: Diffusion implantation: • the wafers are placed in a quartz tube embedded in a heated furnace. • A gas containing the dopant is introduced in the tube. • The high temperatures of the furnace, typically 900 to 1100 °C, cause the dopants to diffuse into the exposed surface both vertically and horizontally. • Not accurate (difference in dopant concentration through the material)
Process steps • Diffusion or Ion implantation: Ion implantation: • dopants are introduced as ions into the material. • The ion implantation system directs and sweeps a beam of purified ions over the semiconductor surface. • The acceleration of the ions determines how deep they will penetrate the material, • the beam current and the exposure time determine the dosage. • It controls depth and dosage, therefore it displaced diffusion implantation in modern semiconductor manufacturing.
Process steps 2) Deposition: • Oxidation SiO2(insulating material) • CVD (Chemical Vapor Deposition) of (Si3N4) (buffer layer, to protect the field oxide ) • chemical deposition (polysilicon) (flows silane gas over the heated wafer coated with SiO2 at a temperature of approximately 650°C • sputtering (Al) (The aluminum is evaporated in a vacuum, with the heat for the evaporation delivered by electron-beam or ion-beam bombarding. )
Process steps 3) Etching: etching is used to selectively form patterns such as Via and contact holes. • Wet Etching: (makes use of acid or basic solutions, such as hydrofluoric acid to etch SiO2) • Dry (or Plasma) Etching: - A wafer is placed into the etch tool's processing chamber and given a negative electrical charge. - The chamber is heated to 100°C and brought to a vacuum level of 7.5 Pa, then filled with a positively charged plasma (usually a mix of nitrogen, chlorine and boron trichloride). - The opposing electrical charges cause the rapidly moving plasma molecules to align themselves in a vertical direction, forming a microscopic chemical and physical “sandblasting” action which removes the exposed material. - Plasma etching has the advantage of offering a well-defined directionality to the etching action, creating patterns with sharp vertical contours.
Process steps 4) Planarization: • This process uses a slurry compound—a liquid carrier with a suspended abrasive component such as aluminum oxide or silica—to microscopically plane a device layer and to reduce the step heights. • chemical-mechanical planarization (CMP) step is included before the deposition of an extra metal layer on top of the insulating SiO2 layer.
CMOS Process Layers Color Legend Layer Color Representation Well (n) Green Active Area (n+) Green Select (n+) Green Well (p) Yellow Active Area (p+) Yellow Yellow Select (p+) Polysilicon Red Metal1 Blue Metal2 Magenta Black Contact orVia
cut line p well Complete Simplified CMOS Inverter Process
A Modern CMOS ProcessTwin-Tub or Dual-Well Trench gate-oxide TiSi AlCu 2 SiO 2 Tungsten SiO p-well n-well 2 n+ p- epi p+ p+ Dual-Well Trench-Isolated CMOS Process
Define active areas Etch and fill trenches Implant well regions Deposit and pattern polysilicon layer Implant source and drain regions and substrate contacts Create contact and via windows Deposit and pattern metal layers Procedure of Modern CMOS Process • One full photolithography sequence per layer (mask)
Base material: p+ substrate with p-epi layer p-epi + p Si N 3 4 SiO After deposition of gate-oxide and sacrifical nitride (acts as a buffer layer) 2 p-epi + p After plasma etch of insulating trenches using the inverse of the active area mask p + Modern CMOS Process Walk-Through
SiO After trench filling, CMP planarization, and removal of sacrificial nitride 2 n After n-well and VTp adjust implants p After p-well and VTn adjust implants CMOS Process Walk-Through (continue)
poly(silicon) After polysilicon deposition and etch n + + p After n+ source/drain and p+ source/drain implants. These steps also dope the polysilicon. SiO 2 After deposition of SiO2 insulator and contact hole etch 3.5 CMOS Process Walk-Through (continue)
Al After deposition and patterning of first Al layer. Al SiO 2 After deposition of SiO2 insulator, etching of via’s, deposition and patterning of second layer of Al. CMOS Process Walk-Through (continue)
