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The Plasma Physics and Radiation Technology master programme is

The Plasma Physics and Radiation Technology master programme is managed by three groups organizing the four main themes: Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden) Elementary processes in Gasdischarges (Prof. G.M.W. Kroesen) Coherence and Quantum Technology

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The Plasma Physics and Radiation Technology master programme is

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  1. The Plasma Physics and Radiation Technology master programme is • managed by three groups organizing the four main themes: • Equilibrium and Transport in Plasmas • (Prof. M.C.M. van de Sanden) • Elementary processes in Gasdischarges • (Prof. G.M.W. Kroesen) • Coherence and Quantum Technology • (Prof. K.A.H. van Leeuwen)

  2. The master track Plasma Physics and Radiation Technology • The track embraces subjects such as: • the generation of plasma’s (including Nuclear Fusion), • plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.), • plasma-accelerators, • laser cooling techniques and atomic optics • ion beam applications. An important characteristic of the master track is the fundamental approach of the themes as well as the research into new applications of this broad field of research.

  3. optional courses: each student has to choose a well-balanced set of courses to a total of at least 33 ECTS points (about 11 courses); interdisciplinary project of 8 ECTS points (6 weeks); external assignment project of 19 ECTS points (12 weeks) usually outside TU/e; graduation project of 60 ECTS points (1 year).

  4. Master track courses:

  5. The three research programmes : Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden/Prof. D.C. Schram) Expanding plasmas and molecule formation Plasma surface interaction and atomistic simulations Plasma synthesis of thin films, nanostructures, and devices Nuclear Fusion (Rijnhuizen) Elementary processes in Plasmas (Prof. G.M.W. Kroesen) Non-equilibrium effects Plasma modelling and Self-organisation in plasmas Lighting, environmental applications Biomedical Applications Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen) Ultrahigh-gradient electron accelerator concepts Nanostructure fabrication by laser manipulation Atom optics/atom interferometry with ultracold atoms Atom traps: ultracold plasmas and BEC’s

  6. Coherence & Quantum Technology (CQT) • Extremestates of matter: Ultra-cold & ultra-hot, plasmas & gases; • Laser Manipulation of atoms, electrons and ions; • Atom, electron & ion beams forfemto-nano science & engineering. • Ultra-Cold Electron & Ion Beams: • Laser cooling & trapping; • Femtosecond (10-15 s) laser physics; • Ultra-low temperature (0.001 - 10 kelvin) plasmas; • Femtosecond electron microscopy; • Sub-nanometer ion beam drilling & milling. Edgar Vredenbregt, Jom Luiten, Peter Mutsaers

  7. Theory of Quantum Gases: • Atoms trapped in an optical lattice; • Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases; • Quantum Plasmas & Beams. Servaas Kokkelmans • Plasma Laser Wakefield Acceleration: • Tera-watt “light bullet” laser physics; • Extreme high-energy-density plasmas; • Giga-electron-volt acceleration in a few cm. Seth Brussaard

  8. Atom beam Standinglight wave Substrate • Nano Brush: • Manipulation of atomic beams with light; • Atom lithography; • Deposition of magnetic nano-structures. Ton van leeuwen

  9. Elementary Processes in Gas Discharges Staff: Prof.dr.ir. G.M.W. Kroesen Prof.dr. J.J.A.M. van der Mullen Dr.ir. W.W. Stoffels Dr.ir. E.M. van Veldhuizen Prof.dr. U. Ebert Prof.dr. M. Haverlag EPG

  10. Elementary Processes in Gas Discharges (EPG) • Light and photons: Efficient lamps and EUV sources • Environmental technology: using plasmas for air / water cleaning • Biomedical technology: sterilisation; new medical treatments • New energy sources: hydrogen technology; dusty plasmas

  11. Plasmas: Heaven and earth

  12. Plasmas in lab and industry (1)

  13. Plasmas in lab and industry (2)

  14. Science & Technology of Plasma & Materials Processing http://www.phys.tue.nl/pmp Prof. dr.ir. Richard van de Sanden Dr. Richard Engeln Dr.ir. Erwin Kessels Dr. Adriana Creatore (8 postdocs; 15 PhD students; 8-12 BSc/MSc students; 5 technicians)

  15. Research activities Micro- and nano-engineering of functional materials Physics and chemistry of plasma & materials processing Plasma enhanced CVD Dry etching Plasma-assisted ALD Thin films & devices Plasma chemistry Ion/radical densities/fluxes Energy distribution fcts. Plasma surface interaction Advanced plasma and surface diagnostics Ellipsometry Nonlinear surface spectroscopy Novel surface diagnostics (Laser) based gas phase diagnostics

  16. Higher reactivity • Process independent of substrate • High throughput/large area processing (e.g. solar cells) Research issues: Plasma-materials processing Reactive species created in gas phase rf plasma More freedom and larger parameter space • Precursors, Material properties • Plasma-assisted ALD • (conformal TiN diffusion barriers, tunnel barriers) Self-bias/Ion bombardment • Etching of high-aspect • ratio structures: ion/neutral synergism Low temperatures • Compatibility with • substrates/devices • Manipulation of ion energy distribution function • Novel synergistic • effects • Organic and polymer devices (encapsulation of OLEDs)

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