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出處： MicroTAS 2006, p693-695

THE MEMBRANE MICRO EMBOSS (MeME) PROCESS FOR FABRICATING 3-D MICROFLUIDIC DEVICE FORMED FROM THIN POLYMER MEMBRANE. 出處： MicroTAS 2006, p693-695 作者： Masashi Ikeuchi and Koji Ikuta, Dept. of Micro/Nano Systems Eng., School of Eng., Nagoya University, Japan 報告者：游振奇 (9533535). Outline.

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出處： MicroTAS 2006, p693-695

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  1. THE MEMBRANE MICRO EMBOSS (MeME) PROCESS FOR FABRICATING 3-D MICROFLUIDIC DEVICE FORMED FROM THIN POLYMER MEMBRANE 出處：MicroTAS 2006, p693-695 作者：Masashi Ikeuchi and Koji Ikuta, Dept. of Micro/Nano Systems Eng., School of Eng., Nagoya University, Japan 報告者：游振奇 (9533535)

  2. Outline • Introduction • MeME Process • Process Conditions • Process Resolutions • Prototype Fabrication • Conclusion

  3. Introduction • DNA chips, protein chips, cell chips, PCR(Polymerase chain reaction) • lab-on-a-chip • Ink-jet printers

  4. Introduction New microfluidic device Traditional microfluidic device

  5. MeME Process

  6. Pressing time Pressing speed Property of support substrates Process Conditions

  7. Pressing Time • Height profiles of the membrane microchannels with width of 50μm under various pressing time period

  8. Pressing Speed • Height profiles of the membrane microchannels with width of 50μm under various pressing speed

  9. Property of Support Substrates • Height profiles of the membrane microchannels with width of 50μm under various melting point of paraffin

  10. Pressure transition • Pressure transition during the MeME process under several process conditions

  11. Process Resolutions • Definition of lateral resolution and vertical resolution

  12. Process Resolutions • SEM of the upper and the under side of the deformed membrane for examining lateral resolution

  13. Process Resolutions • SEM of the upper and the under side of the deformed membrane (height = 5μm) for examining the vertical resolution

  14. Prototype Fabrication (a) master mold (b) underside of the membrane microchannel

  15. Prototype Fabrication (c) Upperside of the membrane microchannel (d) The cross-section after heat-sealing

  16. Prototype Fabrication (e) The membrane microfluidic device before and after filling red-colored water

  17. Conclusion • High precision, speed and simplicity • Applicable to various materials • New application for biological and chemical analysis

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