'Etch dummy spacing' presentation slideshows

Enhanced Resist and Etch CD Control by Design Perturbation

#SB=1. #SB=2. #SB=3. #SB=4. Typical etch dummy rule: fixed rule for active-to-etch dummy spacing SAEDM: change rule of active-to-etch dummy spacing Calculate left poly-to-dummy and right poly-to-dummy spacings to insert Assist Features and Etch Dummies simultaneously

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