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Comparison between the STD and the HCl epitaxial process

Comparison between the STD and the HCl epitaxial process. G. Galvagno, F. La Via, A. Firrincieli, S. Di Franco, F. Roccaforte. OUTLINE. Drift mobility in epitaxial layer 4H-SiC (CREE) Characterization of epitaxial layers deposited by ETC ( standard process and HCl process ).

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Hcl process - PowerPoint PPT Presentation

Comparison between the STD and the HCl epitaxial process