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Pro and Cons about Ge IPL for III-V

Pro and Cons about Ge IPL for III-V. Literature survey. Issues with MBE Ge on III-V. High temp (400C) required for good Epi quality As background contaminates Ge layer Solved by two chamber systems (dedicate Ge growth w/o As) Must bake the As from the Mo platen

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Mbe ge - PowerPoint PPT Presentation

Pro and Cons about Ge IPL for III-V