'Optical lithography' presentation slideshows

Lecture 5

Lecture 5. Optical Lithography. Intro. For most of microfabrication purposes the process (e.g. additive, subtractive or implantation) has to be applied selectively to particular areas of the wafer: patterning is required; Predominately done by optical lithography. Intro.

679 views • 41 slides

Demonstration of Sub-Rayleigh Lithography Using a Multi-Photon Absorber

Demonstration of Sub-Rayleigh Lithography Using a Multi-Photon Absorber. Heedeuk Shin , Hye Jeong Chang*, Malcolm N. O'Sullivan-Hale, Sean Bentley # , and Robert W. Boyd The Institute of Optics, University of Rochester, Rochester, NY 14627, USA

328 views • 19 slides

Demonstration of Sub-Rayleigh Lithography Using a Multi-Photon Absorber

Demonstration of Sub-Rayleigh Lithography Using a Multi-Photon Absorber. Heedeuk Shin , Hye Jeong Chang*, Malcolm N. O'Sullivan-Hale, Sean Bentley # , and Robert W. Boyd The Institute of Optics, University of Rochester, Rochester, NY 14627, USA

196 views • 19 slides

Process to fabricate a certain structure :

LITHOGRAPHY. Lithography is the process of imprinting a geometric pattern from a mask onto a thin layer of material called a resist which is a radiation sensitive polymer. Process to fabricate a certain structure : - First a resist is spin-coated or sprayed onto the wafer.

179 views • 16 slides

Introduction ExCITe Resist WP Leader: Infineon Wolf-Dieter Domke

281 views • 11 slides