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Compositional dependence of damage buildup in Ar - ion bombarded Al x Ga 1-x N

Soltan Institute for Nuclear Studies. Compositional dependence of damage buildup in Ar - ion bombarded Al x Ga 1-x N. Karolina Danuta P?gowska. Outline. 1. Energy loss of ions in solids, collision cascade 2. Ion implanter 3. FET 4. RBS and channeling

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Compositional dependence of damage buildup in Ar - ion bombarded Al x Ga 1-x N