Alumina Measurement by semiconsoft

1. Thin Film Measurement solution Software, sensors, custom development and integration Aluminum oxide and ALON measurement Aluminum oxide (alumina) is widely used as a protective coating in various applications. Optical properties of alumina depend on the deposition conditions. Both thickness and optical constants of the alumina can be measured accurately using MProbe system. Below are several examples of alumina & ALON measurement. 1.Example 1 Alumina on glass slide MProbe Vis system (400-1000nm wavelength range) was used for this measurement. Fig. 1 Results of the alumina on glass measurement. Fit of the model to measured data. Thickness and R.I. of alumina are determined. Thickness: 1202nm (R.I. see Fig. 2) 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

2. Fig. 2. Measured R.I. of alumina (yellow) compared to a standard library alumina (red) 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

3. 2.Example 2. Yttrium oxide/alumina on quartz substrate MProbe Vis system (400-1000nm wavelength range) was used for this measurement. Fig. 3. Results of the Y2O3/Alumina/Quartz measurement. Fit of the model to measured data. Thickness Y2O3: 2535nm , Alumina: 938 nm 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

4. 3.Example 3. ALON/alumina on quartz MProbe VisHR system (700-1000nm wavelength range) was used for this measurement. Fig. 4. Raw reflectance spectrum of the ALON/Alumina/quartz sample Fig. 5. Results of the measurement: ALON thickness-32 μm, Alumina thickness - 5.4 μm (additional interface layer 2.3 μm is also visible). Peak positions indicate layer thicknesses. 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com