Fabrication of Sonic Sensors Using PZT Thin Film on Si Diaphragm and Cantilever
Lab. Of Intelligent Material and Technology. Fabrication of Sonic Sensors Using PZT Thin Film on Si Diaphragm and Cantilever. S. Murakami 1 , K. Inoue 1 , Y. Suzuki 1 , S. Takamatst 2 , T. Kitano 2 , M. Kinoshita 2 , K. Yamashita 3 and M. Okuyama 3
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